@inproceedings{ee425eee6ad244d1a3cfc84ec4f2f419,
title = "A High-Resolution and High-Bandwidth Nano-Optomechanical Accelerometer with Ultra-low Bias Instability",
abstract = "We demonstrate a bulk-micromachined accelerometer with 100 kHz bandwidth featuring an intrinsically differential Mach-Zehnder strain-sensing interferometer. The differential, broadband readout provides reduced susceptibility to temperature, package stress, and laser frequency fluctuations resulting in a bias instability of 7.2 μg at 343.7 seconds.",
author = "Chang Ge and Daniel Dominguez and Allison Rubenok and Michael Miller and Matt Eichenfield",
note = "Publisher Copyright: {\textcopyright} 2025 Optica.; 2025 Conference on Lasers and Electro-Optics, CLEO 2025 ; Conference date: 04-05-2025 Through 09-05-2025",
year = "2025",
language = "English",
series = "2025 Conference on Lasers and Electro-Optics, CLEO 2025",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2025 Conference on Lasers and Electro-Optics, CLEO 2025",
address = "United States",
}