A High-Resolution and High-Bandwidth Nano-Optomechanical MEMS Accelerometer with Ultra-Wide Optical and Temperature Ranges

Chang Ge; Daniel Dominguez; Michael Miller; Matt Eichenfield

A High-Resolution and High-Bandwidth Nano-Optomechanical MEMS Accelerometer with Ultra-Wide Optical and Temperature Ranges

Chang Ge
, Daniel Dominguez
, Michael Miller
, Matt Eichenfield

Research output: Contribution to conference › Paper › peer-review

Abstract

We demonstrate a > 10 milligram, fiber-packaged, ultra-high-sensitivity nano-optomechanical MEMS accelerometer using an intrinsically differential Mach-Zehnder strain-sensing interferometer with 10 µg/√Hz resolution up to 100 kHz. The differential readout is insensitive to wavelength and temperature over ∼40 nm and ∼30 degree ranges, respectively.

Original language	English
State	Published - 2024
Externally published	Yes
Event	2024 Frontiers in Optics, FiO 2024 - Denver, United States Duration: Sep 23 2024 → Sep 26 2024

Conference

Conference	2024 Frontiers in Optics, FiO 2024
Country/Territory	United States
City	Denver
Period	09/23/24 → 09/26/24

Cite this

@conference{9e4b4829916f4c62abf3d60a1d4227d1,

title = "A High-Resolution and High-Bandwidth Nano-Optomechanical MEMS Accelerometer with Ultra-Wide Optical and Temperature Ranges",

abstract = "We demonstrate a > 10 milligram, fiber-packaged, ultra-high-sensitivity nano-optomechanical MEMS accelerometer using an intrinsically differential Mach-Zehnder strain-sensing interferometer with 10 µg/√Hz resolution up to 100 kHz. The differential readout is insensitive to wavelength and temperature over ∼40 nm and ∼30 degree ranges, respectively.",

author = "Chang Ge and Daniel Dominguez and Michael Miller and Matt Eichenfield",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2024, {\textcopyright} 2024 The Author(s); 2024 Frontiers in Optics, FiO 2024 ; Conference date: 23-09-2024 Through 26-09-2024",

year = "2024",

language = "English",

}

TY - CONF

T1 - A High-Resolution and High-Bandwidth Nano-Optomechanical MEMS Accelerometer with Ultra-Wide Optical and Temperature Ranges

AU - Ge, Chang

AU - Dominguez, Daniel

AU - Miller, Michael

AU - Eichenfield, Matt

PY - 2024

Y1 - 2024

N2 - We demonstrate a > 10 milligram, fiber-packaged, ultra-high-sensitivity nano-optomechanical MEMS accelerometer using an intrinsically differential Mach-Zehnder strain-sensing interferometer with 10 µg/√Hz resolution up to 100 kHz. The differential readout is insensitive to wavelength and temperature over ∼40 nm and ∼30 degree ranges, respectively.

AB - We demonstrate a > 10 milligram, fiber-packaged, ultra-high-sensitivity nano-optomechanical MEMS accelerometer using an intrinsically differential Mach-Zehnder strain-sensing interferometer with 10 µg/√Hz resolution up to 100 kHz. The differential readout is insensitive to wavelength and temperature over ∼40 nm and ∼30 degree ranges, respectively.

UR - https://www.scopus.com/pages/publications/85215962180

M3 - Paper

AN - SCOPUS:85215962180

T2 - 2024 Frontiers in Optics, FiO 2024

Y2 - 23 September 2024 through 26 September 2024

ER -

A High-Resolution and High-Bandwidth Nano-Optomechanical MEMS Accelerometer with Ultra-Wide Optical and Temperature Ranges

Abstract

Conference

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