Abstract
We demonstrate chemical/biological sensor arrays based on high quality factor evanescent microring waveguide resonators in a process that is compatible with CMOS fabrication, glass microfluidic integration, and robust surface chemistry ligand attachment. We cancel out any fluctuations due to liquid temperature variations through a differential dual sensor design. Using laser locking servo techniques we attain detection sensitivities in the ng/ml range. This combination of silicon photonic sensors, robust packaging, high sensitivity and arrayed design is capable of providing a platform for multiplexed chem-bio sensing of molecules suspended in solution. © 2010 Copyright SPIE - The International Society for Optical Engineering.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 7605 |
| DOIs | |
| State | Published - May 3 2010 |
| Externally published | Yes |
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