Skip to main navigation Skip to search Skip to main content

A platform for multiplexed sensing of biomolecules using high-Q microring resonator arrays with differential readout and integrated microfluidics

  • J. B. Wright
  • , I. Brener
  • , K. R. Westlake
  • , D. W. Branch
  • , M. J. Shaw
  • , G. A. Vawter

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations

Abstract

We demonstrate chemical/biological sensor arrays based on high quality factor evanescent microring waveguide resonators in a process that is compatible with CMOS fabrication, glass microfluidic integration, and robust surface chemistry ligand attachment. We cancel out any fluctuations due to liquid temperature variations through a differential dual sensor design. Using laser locking servo techniques we attain detection sensitivities in the ng/ml range. This combination of silicon photonic sensors, robust packaging, high sensitivity and arrayed design is capable of providing a platform for multiplexed chem-bio sensing of molecules suspended in solution. © 2010 Copyright SPIE - The International Society for Optical Engineering.
Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume7605
DOIs
StatePublished - May 3 2010
Externally publishedYes

Fingerprint

Dive into the research topics of 'A platform for multiplexed sensing of biomolecules using high-Q microring resonator arrays with differential readout and integrated microfluidics'. Together they form a unique fingerprint.

Cite this