Accessing Atomic-scale Phosphorus Dopant Distribution in Precise Silicon Devices by Advanced STEM Imaging and Spectroscopy

Ping Lu; Evan Anderson; Scott Schmucker; Fabian Pena; Esther Frederick; Jeffrey Ivie; Ezra Bussmann; Deanna Lopez; Lisa Tracy; Tzu Ming Lu; George Wang; Daniel Ward; Shashank Misra

doi:10.1017/S1431927620018371

Accessing Atomic-scale Phosphorus Dopant Distribution in Precise Silicon Devices by Advanced STEM Imaging and Spectroscopy

Ping Lu
, Evan Anderson
, Scott Schmucker
, Fabian Pena
, Esther Frederick
, Jeffrey Ivie
, Ezra Bussmann
, Deanna Lopez
, Lisa Tracy
, Tzu Ming Lu
, George Wang
, Daniel Ward
, Shashank Misra

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Microscopy and Microanalysis
DOIs	https://doi.org/10.1017/S1431927620018371
State	Published - Jan 1 2020
Externally published	Yes

Access to Document

10.1017/S1431927620018371

Cite this

@inproceedings{99a200c25cb142bcaa4d0ffe4b07b36a,

title = "Accessing Atomic-scale Phosphorus Dopant Distribution in Precise Silicon Devices by Advanced STEM Imaging and Spectroscopy",

author = "Ping Lu and Evan Anderson and Scott Schmucker and Fabian Pena and Esther Frederick and Jeffrey Ivie and Ezra Bussmann and Deanna Lopez and Lisa Tracy and Lu, \{Tzu Ming\} and George Wang and Daniel Ward and Shashank Misra",

year = "2020",

month = jan,

day = "1",

doi = "10.1017/S1431927620018371",

language = "English",

booktitle = "Microscopy and Microanalysis",

}

TY - GEN

T1 - Accessing Atomic-scale Phosphorus Dopant Distribution in Precise Silicon Devices by Advanced STEM Imaging and Spectroscopy

AU - Lu, Ping

AU - Anderson, Evan

AU - Schmucker, Scott

AU - Pena, Fabian

AU - Frederick, Esther

AU - Ivie, Jeffrey

AU - Bussmann, Ezra

AU - Lopez, Deanna

AU - Tracy, Lisa

AU - Lu, Tzu Ming

AU - Wang, George

AU - Ward, Daniel

AU - Misra, Shashank

PY - 2020/1/1

Y1 - 2020/1/1

UR - https://www.scopus.com/pages/publications/85091848608

U2 - 10.1017/S1431927620018371

DO - 10.1017/S1431927620018371

M3 - Conference contribution

BT - Microscopy and Microanalysis

ER -