TY - JOUR
T1 - Advancing microelectronics through nanoscale science
T2 - A perspective on needs and opportunities from the nanoscale science research centers
AU - Bradicich, Adelaide
AU - Allemang, Christopher R.
AU - Addamane, Sadhvikas
AU - House, Stephen D.
AU - Chen, Aiping
AU - Yoo, Jinkyoung
AU - Bussmann, Ezra
AU - Smyth, Christopher M.
AU - Maksymovych, Petro
AU - Checa, Marti
AU - Neumayer, Sabine
AU - Dyck, Ondrej
AU - Wen, Jianguo
AU - Basso, Luca
AU - Kehayias, Pauli
AU - Mounce, Andy M.
AU - Doiron, Chloe F.
AU - Pettes, Michael Thompson
AU - Li, Nan
AU - Yates, Luke
AU - Jarzembski, Amun
AU - Harris, C. Thomas
AU - Nam, Chang Yong
AU - Titze, Michael
AU - Hackett, Lisa
AU - Wali, Akshay
AU - Sumant, Anirudha V.
AU - Iyer, Prasad
AU - Pan, Wei
AU - Jozwiak, Chris
AU - Ruiz, Ricardo
AU - Dingreville, Remi
AU - Nelson, Jeffrey S.
AU - Lu, Tzu Ming
N1 - Publisher Copyright:
© 2025 Author(s).
PY - 2025/12/1
Y1 - 2025/12/1
N2 - Microelectronics are the cornerstone of the modern world, enhancing our daily lives by providing services such as communications and datacenters. These resources are accessible thanks to the continual pursuit of a deeper understanding of the chemical and physical phenomena underlying the materials synthesis approaches and fabrication processes used to create microelectronic components and subsequently the components' responses to electrical, optical, and other stimuli that are utilized within microelectronic systems. Today, further development of microelectronics requires multidisciplinary expertise across scientific disciplines and fields of study—synthesis, materials characterization, nanoscale fabrication, and performance characterization—with focus placed on comprehending the nanoscale forms and features of microelectronic components. The Nanoscale Science Research Centers (NSRCs) are Department of Energy, Office of Science user facilities that support the international scientific community in advancing nanoscale science and technology. As a key component of the U.S. Government's National Nanotechnology Initiative, the NSRCs enable transformative discoveries by providing world-class facilities, expertise, and collaborative opportunities. In this perspective, we showcase a non-exhaustive cross-section of the capabilities housed at and developed by the NSRCs and their user communities to address fundamental synthesis, metrology, fabrication, and performance considerations toward advancing the development of new microelectronics. Finally, we provide a timely outlook on the next major areas of necessary development in nanoscale sciences to continue the innovation of microelectronics into the next generation.
AB - Microelectronics are the cornerstone of the modern world, enhancing our daily lives by providing services such as communications and datacenters. These resources are accessible thanks to the continual pursuit of a deeper understanding of the chemical and physical phenomena underlying the materials synthesis approaches and fabrication processes used to create microelectronic components and subsequently the components' responses to electrical, optical, and other stimuli that are utilized within microelectronic systems. Today, further development of microelectronics requires multidisciplinary expertise across scientific disciplines and fields of study—synthesis, materials characterization, nanoscale fabrication, and performance characterization—with focus placed on comprehending the nanoscale forms and features of microelectronic components. The Nanoscale Science Research Centers (NSRCs) are Department of Energy, Office of Science user facilities that support the international scientific community in advancing nanoscale science and technology. As a key component of the U.S. Government's National Nanotechnology Initiative, the NSRCs enable transformative discoveries by providing world-class facilities, expertise, and collaborative opportunities. In this perspective, we showcase a non-exhaustive cross-section of the capabilities housed at and developed by the NSRCs and their user communities to address fundamental synthesis, metrology, fabrication, and performance considerations toward advancing the development of new microelectronics. Finally, we provide a timely outlook on the next major areas of necessary development in nanoscale sciences to continue the innovation of microelectronics into the next generation.
UR - https://www.scopus.com/pages/publications/105019207828
U2 - 10.1063/5.0283106
DO - 10.1063/5.0283106
M3 - Review article
AN - SCOPUS:105019207828
SN - 1931-9401
VL - 12
JO - Applied Physics Reviews
JF - Applied Physics Reviews
IS - 4
M1 - 041308
ER -