@inproceedings{7fefb9f6dec34532b00e1cdfb5ec54b2,
title = "Alumina Based Piezo-Optomechanical Blue and Ultraviolet Photonic Integrated Circuits in a VLSI Architecture",
abstract = "We demonstrate VLSI-fabricated piezo-optomechanical photonic integrated circuits operating in the blue (420 nm) and UV (320 nm) spectral ranges. We characterize their performance and discuss their application to important problems in quantum information processing.",
keywords = "Electro-optical waveguides, Information processing, Laser applications, Lasers and electrooptics, Photonic integrated circuits, Very large scale integration",
author = "Roman Shugayev and Daniel Dominguez and Andrew Leenheer and Bethany Little and Matt Chow and Jau, \{Yuan Yu\} and Matt Eichenfield",
note = "Publisher Copyright: CLEO 2024 {\textcopyright} Optica Publishing Group 2024 {\textcopyright} 2024 The Author(s); 2024 Conference on Lasers and Electro-Optics, CLEO 2024 ; Conference date: 07-05-2024 Through 10-05-2024",
year = "2024",
doi = "10.1364/cleo\_si.2024.sf1m.6",
language = "English",
series = "2024 Conference on Lasers and Electro-Optics, CLEO 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 Conference on Lasers and Electro-Optics, CLEO 2024",
address = "United States",
}