Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films

Sami A. Nazib; Mark V. Reymatias; Troy A. Hutchins-Delgado; Shruti I. Gharde; Erika M. Sommer; Erum Jamil; Gennady A. Smolyakov; Tzu Ming Lu; Sergei A. Ivanov; Ivan Komissarov; Roman Sobolewski; Marek Osinski

doi:10.1109/NMDC57951.2023.10343963

Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films

Sami A. Nazib
, Mark V. Reymatias
, Troy A. Hutchins-Delgado
, Shruti I. Gharde
, Erika M. Sommer
, Erum Jamil
, Gennady A. Smolyakov
, Tzu Ming Lu
, Sergei A. Ivanov
, Ivan Komissarov
, Roman Sobolewski
, Marek Osinski

Los Alamos National Laboratory

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Comprehensive characterization techniques are applied to investigate the kinetics of native oxide formation on nanometer-scale films of NbTiN deposited using a physical vapor deposition process on silicon substrates coated with silicon nitride.

Original language	English
Title of host publication	2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023
Publisher	Unknown Publisher
Pages	366-367
Number of pages	2
ISBN (Electronic)	9798350335460
DOIs	https://doi.org/10.1109/NMDC57951.2023.10343963
State	Published - 2023
Event	18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023 - Duration: Jan 1 2023 → …

Publication series

Name	2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023

Conference

Conference	18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023
Period	01/1/23 → …

Access to Document

10.1109/NMDC57951.2023.10343963

Cite this

Nazib, S. A., Reymatias, M. V., Hutchins-Delgado, T. A., Gharde, S. I., Sommer, E. M., Jamil, E., Smolyakov, G. A., Lu, T. M., Ivanov, S. A., Komissarov, I., Sobolewski, R., & Osinski, M. (2023). Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films. In 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023 (pp. 366-367). (2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023). Unknown Publisher. https://doi.org/10.1109/NMDC57951.2023.10343963

@inproceedings{bf7524735f624444bdca9aafd0c68514,

title = "Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films",

abstract = "Comprehensive characterization techniques are applied to investigate the kinetics of native oxide formation on nanometer-scale films of NbTiN deposited using a physical vapor deposition process on silicon substrates coated with silicon nitride.",

author = "Nazib, \{Sami A.\} and Reymatias, \{Mark V.\} and Hutchins-Delgado, \{Troy A.\} and Gharde, \{Shruti I.\} and Sommer, \{Erika M.\} and Erum Jamil and Smolyakov, \{Gennady A.\} and Lu, \{Tzu Ming\} and Ivanov, \{Sergei A.\} and Ivan Komissarov and Roman Sobolewski and Marek Osinski",

year = "2023",

doi = "10.1109/NMDC57951.2023.10343963",

language = "English",

series = "2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023",

publisher = "Unknown Publisher",

pages = "366--367",

booktitle = "2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023",

note = "18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023 ; Conference date: 01-01-2023",

}

Nazib, SA, Reymatias, MV, Hutchins-Delgado, TA, Gharde, SI, Sommer, EM, Jamil, E, Smolyakov, GA, Lu, TM, Ivanov, SA, Komissarov, I, Sobolewski, R & Osinski, M 2023, Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films. in 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023. 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023, Unknown Publisher, pp. 366-367, 18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023, 01/1/23. https://doi.org/10.1109/NMDC57951.2023.10343963

Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films. / Nazib, Sami A.; Reymatias, Mark V.; Hutchins-Delgado, Troy A. et al.
2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023. Unknown Publisher, 2023. p. 366-367 (2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films

AU - Nazib, Sami A.

AU - Reymatias, Mark V.

AU - Hutchins-Delgado, Troy A.

AU - Gharde, Shruti I.

AU - Sommer, Erika M.

AU - Jamil, Erum

AU - Smolyakov, Gennady A.

AU - Lu, Tzu Ming

AU - Ivanov, Sergei A.

AU - Komissarov, Ivan

AU - Sobolewski, Roman

AU - Osinski, Marek

PY - 2023

Y1 - 2023

N2 - Comprehensive characterization techniques are applied to investigate the kinetics of native oxide formation on nanometer-scale films of NbTiN deposited using a physical vapor deposition process on silicon substrates coated with silicon nitride.

AB - Comprehensive characterization techniques are applied to investigate the kinetics of native oxide formation on nanometer-scale films of NbTiN deposited using a physical vapor deposition process on silicon substrates coated with silicon nitride.

UR - https://www.scopus.com/pages/publications/85182021755

U2 - 10.1109/NMDC57951.2023.10343963

DO - 10.1109/NMDC57951.2023.10343963

M3 - Conference contribution

T3 - 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023

SP - 366

EP - 367

BT - 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023

PB - Unknown Publisher

T2 - 18th IEEE Nanotechnology Materials and Devices Conference, NMDC 2023

Y2 - 1 January 2023

ER -

Nazib SA, Reymatias MV, Hutchins-Delgado TA, Gharde SI, Sommer EM, Jamil E et al. Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films. In 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023. Unknown Publisher. 2023. p. 366-367. (2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023). doi: 10.1109/NMDC57951.2023.10343963

Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films

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