Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

Nancy Missert; Paul G. Kotula; Michael Rye; Laura Rehm; Volker Sluka; Andrew D. Kent; Daniel Yohannes; Alex F. Kirichenko; Igor V. Vernik; Oleg A. Mukhanov; Vladimir Bolkhovsky; Alex Wynn; Leonard Johnson; Mark Gouker

doi:10.1109/TASC.2017.2669579

Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

Nancy Missert
, Paul G. Kotula
, Michael Rye
, Laura Rehm
, Volker Sluka
, Andrew D. Kent
, Daniel Yohannes
, Alex F. Kirichenko
, Igor V. Vernik
, Oleg A. Mukhanov
, Vladimir Bolkhovsky
, Alex Wynn
, Leonard Johnson
, Mark Gouker

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

Original language	English
Journal	IEEE Transactions on Applied Superconductivity
Volume	27
Issue number	4
DOIs	https://doi.org/10.1109/TASC.2017.2669579
State	Published - Jun 1 2017
Externally published	Yes

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Missert, N., Kotula, P. G., Rye, M., Rehm, L., Sluka, V., Kent, A. D., Yohannes, D., Kirichenko, A. F., Vernik, I. V., Mukhanov, O. A., Bolkhovsky, V., Wynn, A., Johnson, L., & Gouker, M. (2017). Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy. IEEE Transactions on Applied Superconductivity, 27(4). https://doi.org/10.1109/TASC.2017.2669579

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title = "Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy",

abstract = "A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.",

author = "Nancy Missert and Kotula, \{Paul G.\} and Michael Rye and Laura Rehm and Volker Sluka and Kent, \{Andrew D.\} and Daniel Yohannes and Kirichenko, \{Alex F.\} and Vernik, \{Igor V.\} and Mukhanov, \{Oleg A.\} and Vladimir Bolkhovsky and Alex Wynn and Leonard Johnson and Mark Gouker",

year = "2017",

month = jun,

day = "1",

doi = "10.1109/TASC.2017.2669579",

language = "English",

volume = "27",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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}

Missert, N, Kotula, PG, Rye, M, Rehm, L, Sluka, V, Kent, AD, Yohannes, D, Kirichenko, AF, Vernik, IV, Mukhanov, OA, Bolkhovsky, V, Wynn, A, Johnson, L & Gouker, M 2017, 'Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy', IEEE Transactions on Applied Superconductivity, vol. 27, no. 4. https://doi.org/10.1109/TASC.2017.2669579

TY - JOUR

T1 - Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

AU - Missert, Nancy

AU - Kotula, Paul G.

AU - Rye, Michael

AU - Rehm, Laura

AU - Sluka, Volker

AU - Kent, Andrew D.

AU - Yohannes, Daniel

AU - Kirichenko, Alex F.

AU - Vernik, Igor V.

AU - Mukhanov, Oleg A.

AU - Bolkhovsky, Vladimir

AU - Wynn, Alex

AU - Johnson, Leonard

AU - Gouker, Mark

PY - 2017/6/1

Y1 - 2017/6/1

N2 - A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

AB - A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

UR - https://www.scopus.com/pages/publications/85017586122

U2 - 10.1109/TASC.2017.2669579

DO - 10.1109/TASC.2017.2669579

M3 - Article

SN - 1051-8223

VL - 27

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 4

ER -

Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

Abstract

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