Apertureless terahertz near-field microscopy

Gyu Cheon Cho; Houtong Chen; Simon Kraatz; Nicholas Karpowicz; Roland Kersting

doi:10.1088/0268-1242/20/7/020

Apertureless terahertz near-field microscopy

Gyu Cheon Cho
, Houtong Chen
, Simon Kraatz
, Nicholas Karpowicz
, Roland Kersting

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Abstract

Terahertz near-field microscopy may serve as a novel tool to measure the high-frequency permittivity of dielectric surfaces on submicrometre semiconductor structures. We present an apertureless THz near-field microscope, which allows for spatial resolutions as small as 150 nm. A new model has been developed that considers the field coupling the scanning probe with a sample and reproduces the image data qualitatively and quantitatively.

Original language	English
Journal	Semiconductor Science and Technology
Volume	20
Issue number	7
DOIs	https://doi.org/10.1088/0268-1242/20/7/020
State	Published - Jul 1 2005
Externally published	Yes

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title = "Apertureless terahertz near-field microscopy",

abstract = "Terahertz near-field microscopy may serve as a novel tool to measure the high-frequency permittivity of dielectric surfaces on submicrometre semiconductor structures. We present an apertureless THz near-field microscope, which allows for spatial resolutions as small as 150 nm. A new model has been developed that considers the field coupling the scanning probe with a sample and reproduces the image data qualitatively and quantitatively.",

author = "Cho, \{Gyu Cheon\} and Houtong Chen and Simon Kraatz and Nicholas Karpowicz and Roland Kersting",

year = "2005",

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T1 - Apertureless terahertz near-field microscopy

AU - Cho, Gyu Cheon

AU - Chen, Houtong

AU - Kraatz, Simon

AU - Karpowicz, Nicholas

AU - Kersting, Roland

PY - 2005/7/1

Y1 - 2005/7/1

N2 - Terahertz near-field microscopy may serve as a novel tool to measure the high-frequency permittivity of dielectric surfaces on submicrometre semiconductor structures. We present an apertureless THz near-field microscope, which allows for spatial resolutions as small as 150 nm. A new model has been developed that considers the field coupling the scanning probe with a sample and reproduces the image data qualitatively and quantitatively.

AB - Terahertz near-field microscopy may serve as a novel tool to measure the high-frequency permittivity of dielectric surfaces on submicrometre semiconductor structures. We present an apertureless THz near-field microscope, which allows for spatial resolutions as small as 150 nm. A new model has been developed that considers the field coupling the scanning probe with a sample and reproduces the image data qualitatively and quantitatively.

UR - https://www.scopus.com/pages/publications/21044454867

U2 - 10.1088/0268-1242/20/7/020

DO - 10.1088/0268-1242/20/7/020

M3 - Article

SN - 0268-1242

VL - 20

JO - Semiconductor Science and Technology

JF - Semiconductor Science and Technology

IS - 7

ER -

Apertureless terahertz near-field microscopy

Abstract

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