@article{fa1c381c2fe64fd698f7dba2f5458089,
title = "Atomic precision advanced manufacturing for digital electronics",
author = "Ward, \{Daniel R.\} and Schmucker, \{Scott W.\} and Anderson, \{Evan M.\} and Ezra Bussmann and Lisa Tracy and Lu, \{Tzu Ming\} and Maurer, \{Leon N.\} and Andrew Baczewski and Campbell, \{Deanna M.\} and Marshall, \{Michael T.\} and Shashank Misra",
year = "2020",
month = feb,
day = "1",
language = "English",
volume = "22",
pages = "4--10",
journal = "Electronic Device Failure Analysis",
issn = "1537-0755",
publisher = "ASM International",
number = "1",
}