Capillary adhesion model for contacting micromachined surfaces

Frank W. DelRio; Martin L. Dunn; Maarten P. de Boer

doi:10.1016/j.scriptamat.2008.02.037

Capillary adhesion model for contacting micromachined surfaces

Frank W. DelRio
, Martin L. Dunn
, Maarten P. de Boer

Research output: Contribution to journal › Article › peer-review

43 Scopus citations

Abstract

A capillary adhesion model for contacting micromachined surfaces is presented. It is found that the effect of plasticity is small while that of surface correlations and disjoining pressure are important. By matching the model to experimental results, we extract the thickness of the disjoining layer vs. relative humidity (RH) and compare it to reported values. The extracted thickness is smaller than those in the literature, which may explain why capillarity effects occur only at relatively high RH in the experiments. © 2008 Acta Materialia Inc.

Original language	English
Pages (from-to)	916-920
Number of pages	5
Journal	Scripta Materialia
Volume	59
Issue number	9
DOIs	https://doi.org/10.1016/j.scriptamat.2008.02.037
State	Published - Nov 1 2008
Externally published	Yes

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title = "Capillary adhesion model for contacting micromachined surfaces",

abstract = "A capillary adhesion model for contacting micromachined surfaces is presented. It is found that the effect of plasticity is small while that of surface correlations and disjoining pressure are important. By matching the model to experimental results, we extract the thickness of the disjoining layer vs. relative humidity (RH) and compare it to reported values. The extracted thickness is smaller than those in the literature, which may explain why capillarity effects occur only at relatively high RH in the experiments. {\textcopyright} 2008 Acta Materialia Inc.",

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AU - DelRio, Frank W.

AU - Dunn, Martin L.

AU - de Boer, Maarten P.

PY - 2008/11/1

Y1 - 2008/11/1

N2 - A capillary adhesion model for contacting micromachined surfaces is presented. It is found that the effect of plasticity is small while that of surface correlations and disjoining pressure are important. By matching the model to experimental results, we extract the thickness of the disjoining layer vs. relative humidity (RH) and compare it to reported values. The extracted thickness is smaller than those in the literature, which may explain why capillarity effects occur only at relatively high RH in the experiments. © 2008 Acta Materialia Inc.

AB - A capillary adhesion model for contacting micromachined surfaces is presented. It is found that the effect of plasticity is small while that of surface correlations and disjoining pressure are important. By matching the model to experimental results, we extract the thickness of the disjoining layer vs. relative humidity (RH) and compare it to reported values. The extracted thickness is smaller than those in the literature, which may explain why capillarity effects occur only at relatively high RH in the experiments. © 2008 Acta Materialia Inc.

UR - https://www.scopus.com/pages/publications/49949108423

U2 - 10.1016/j.scriptamat.2008.02.037

DO - 10.1016/j.scriptamat.2008.02.037

M3 - Article

SN - 1359-6462

VL - 59

SP - 916

EP - 920

JO - Scripta Materialia

JF - Scripta Materialia

IS - 9

ER -

Capillary adhesion model for contacting micromachined surfaces

Abstract

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