Characterization of copper oxide deposited on α-Al<inf>2</inf>O<inf>3</inf> by pulsed-laser ablation

In this study, copper oxide were deposited onto single-crystal substrates of (0001) and (11̄02) α-(Al2O3) using pulsed-laser ablation, with the effect of substrate temperature being examined. The beam from the excimer laser was focused into the deposition chamber and onto a rotating CuO target positioned at 45° angle of incidence of the beam. The depositions were performed with the Al2O3 attached to a substrates heater positioned 6 cm from the target. The samples onto which depositions were performed consisted of both bulk and prethinned TEM specimens. Using both SEM and TEM, the samples were characterized after deposition.