Compact Piezoelectric Photonic Crystal Modulator in a Visible-NIR 200 mm CMOS Architecture

David Heim; Y. Henry Wen; Mark Dong; Hugo Larocque; Andrew J. Leenheer; Gerald Gilbert; Matt Eichenfield; Mikkel Heuck; Dirk R. Englund

Compact Piezoelectric Photonic Crystal Modulator in a Visible-NIR 200 mm CMOS Architecture

David Heim
, Y. Henry Wen
, Mark Dong
, Hugo Larocque
, Andrew J. Leenheer
, Gerald Gilbert
, Matt Eichenfield
, Mikkel Heuck
, Dirk R. Englund

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate a silicon nitride photonic crystal cavity modulated via piezo-mechanical actuators fabricated in a broadband CMOS platform. We measure >25 dB extinction with Fano resonances in a small footprint Mach-Zehnder interferometer configuration.

Original language	English
Title of host publication	Optics InfoBase Conference Papers
State	Published - Jan 1 2022
Externally published	Yes

Cite this

@inproceedings{09d511c5fda941f1b42f950f029855a6,

title = "Compact Piezoelectric Photonic Crystal Modulator in a Visible-NIR 200 mm CMOS Architecture",

abstract = "We demonstrate a silicon nitride photonic crystal cavity modulated via piezo-mechanical actuators fabricated in a broadband CMOS platform. We measure >25 dB extinction with Fano resonances in a small footprint Mach-Zehnder interferometer configuration.",

author = "David Heim and Wen, \{Y. Henry\} and Mark Dong and Hugo Larocque and Leenheer, \{Andrew J.\} and Gerald Gilbert and Matt Eichenfield and Mikkel Heuck and Englund, \{Dirk R.\}",

year = "2022",

month = jan,

day = "1",

language = "English",

booktitle = "Optics InfoBase Conference Papers",

}

TY - GEN

T1 - Compact Piezoelectric Photonic Crystal Modulator in a Visible-NIR 200 mm CMOS Architecture

AU - Heim, David

AU - Wen, Y. Henry

AU - Dong, Mark

AU - Larocque, Hugo

AU - Leenheer, Andrew J.

AU - Gilbert, Gerald

AU - Eichenfield, Matt

AU - Heuck, Mikkel

AU - Englund, Dirk R.

PY - 2022/1/1

Y1 - 2022/1/1

N2 - We demonstrate a silicon nitride photonic crystal cavity modulated via piezo-mechanical actuators fabricated in a broadband CMOS platform. We measure >25 dB extinction with Fano resonances in a small footprint Mach-Zehnder interferometer configuration.

AB - We demonstrate a silicon nitride photonic crystal cavity modulated via piezo-mechanical actuators fabricated in a broadband CMOS platform. We measure >25 dB extinction with Fano resonances in a small footprint Mach-Zehnder interferometer configuration.

UR - https://www.scopus.com/pages/publications/85136821966

M3 - Conference contribution

BT - Optics InfoBase Conference Papers

ER -

Compact Piezoelectric Photonic Crystal Modulator in a Visible-NIR 200 mm CMOS Architecture

Abstract

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