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Cross‐sectional reflection electron microscopy of III–V compound epilayers

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Reflection electron microscopy (REM) is shown to be applicable to the testing of the quality of AlxGa1−xAs/GaAs layer structures. Cross‐sectional images of quantum well structures with layer thickness down to 1 nm can be obtained. The practical aspects of the REM technique are presented. The most important advantages and drawbacks of cross‐sectional REM are discussed in detail. Copyright © 1985 Wiley‐Liss, Inc.
Original languageEnglish
Pages (from-to)533-546
Number of pages14
JournalJournal of Electron Microscopy Technique
Volume2
Issue number6
DOIs
StatePublished - Jan 1 1985
Externally publishedYes

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