Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films

M. Eichenfield; R. H. Olsson

doi:10.1109/ULTSYM.2013.0194

Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films

M. Eichenfield
, R. H. Olsson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

Transducers are designed and fabricated that produce a Gaussian acoustic beam in a 750 nm thick suspended aluminum nitride membrane. The properties of the acoustic beam formed by the transducer are studied by means of a scanning confocal balanced homodyne interferometer, which we use for Doppler vibrometery. We also study the RF transmission properties of the acoustic beams as they interact with sub-wavelength aperture waveguides. © 2013 IEEE.

Original language	English
Title of host publication	IEEE International Ultrasonics Symposium, IUS
Pages	753-756
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2013.0194
State	Published - Dec 1 2013
Externally published	Yes

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@inproceedings{6472bfd7c8714d2b8e4f336e1e201a64,

title = "Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films",

abstract = "Transducers are designed and fabricated that produce a Gaussian acoustic beam in a 750 nm thick suspended aluminum nitride membrane. The properties of the acoustic beam formed by the transducer are studied by means of a scanning confocal balanced homodyne interferometer, which we use for Doppler vibrometery. We also study the RF transmission properties of the acoustic beams as they interact with sub-wavelength aperture waveguides. {\textcopyright} 2013 IEEE.",

author = "M. Eichenfield and Olsson, \{R. H.\}",

year = "2013",

month = dec,

day = "1",

doi = "10.1109/ULTSYM.2013.0194",

language = "English",

isbn = "9781467356862",

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booktitle = "IEEE International Ultrasonics Symposium, IUS",

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T1 - Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films

AU - Eichenfield, M.

AU - Olsson, R. H.

PY - 2013/12/1

Y1 - 2013/12/1

N2 - Transducers are designed and fabricated that produce a Gaussian acoustic beam in a 750 nm thick suspended aluminum nitride membrane. The properties of the acoustic beam formed by the transducer are studied by means of a scanning confocal balanced homodyne interferometer, which we use for Doppler vibrometery. We also study the RF transmission properties of the acoustic beams as they interact with sub-wavelength aperture waveguides. © 2013 IEEE.

AB - Transducers are designed and fabricated that produce a Gaussian acoustic beam in a 750 nm thick suspended aluminum nitride membrane. The properties of the acoustic beam formed by the transducer are studied by means of a scanning confocal balanced homodyne interferometer, which we use for Doppler vibrometery. We also study the RF transmission properties of the acoustic beams as they interact with sub-wavelength aperture waveguides. © 2013 IEEE.

UR - https://www.scopus.com/pages/publications/84894381918

U2 - 10.1109/ULTSYM.2013.0194

DO - 10.1109/ULTSYM.2013.0194

M3 - Conference contribution

SN - 9781467356862

SP - 753

EP - 756

BT - IEEE International Ultrasonics Symposium, IUS

ER -

Design, fabrication, and measurement of RF IDTs for efficient coupling to wavelength-scale structures in thin piezoelectric films

Abstract

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