Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry

Matthew A. Koppa; Mark Dong; David Heim; Andrew J. Leenheer; Matthew Zimmermann; Daniel Dominguez; Gerald Gilbert; Dirk Englund; Matt Eichenfield

Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry

Matthew A. Koppa
, Mark Dong
, David Heim
, Andrew J. Leenheer
, Matthew Zimmermann
, Daniel Dominguez
, Gerald Gilbert
, Dirk Englund
, Matt Eichenfield

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We measure the photoelastic constants of piezo-optomechanical photonic integrated circuits incorporating a specially formulated, silicon-depleted silicon nitride thin films using a laser doppler vibrometer to calibrate the strain produced by the integrated piezoelectric actuators.

Original language	English
Title of host publication	Optics InfoBase Conference Papers
State	Published - Jan 1 2021
Externally published	Yes

Cite this

@inproceedings{123510134600444e948c27ec9ccc7026,

title = "Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry",

abstract = "We measure the photoelastic constants of piezo-optomechanical photonic integrated circuits incorporating a specially formulated, silicon-depleted silicon nitride thin films using a laser doppler vibrometer to calibrate the strain produced by the integrated piezoelectric actuators.",

author = "Koppa, \{Matthew A.\} and Mark Dong and David Heim and Leenheer, \{Andrew J.\} and Matthew Zimmermann and Daniel Dominguez and Gerald Gilbert and Dirk Englund and Matt Eichenfield",

year = "2021",

month = jan,

day = "1",

language = "English",

booktitle = "Optics InfoBase Conference Papers",

}

TY - GEN

T1 - Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry

AU - Koppa, Matthew A.

AU - Dong, Mark

AU - Heim, David

AU - Leenheer, Andrew J.

AU - Zimmermann, Matthew

AU - Dominguez, Daniel

AU - Gilbert, Gerald

AU - Englund, Dirk

AU - Eichenfield, Matt

PY - 2021/1/1

Y1 - 2021/1/1

N2 - We measure the photoelastic constants of piezo-optomechanical photonic integrated circuits incorporating a specially formulated, silicon-depleted silicon nitride thin films using a laser doppler vibrometer to calibrate the strain produced by the integrated piezoelectric actuators.

AB - We measure the photoelastic constants of piezo-optomechanical photonic integrated circuits incorporating a specially formulated, silicon-depleted silicon nitride thin films using a laser doppler vibrometer to calibrate the strain produced by the integrated piezoelectric actuators.

UR - https://www.scopus.com/pages/publications/85130237441

M3 - Conference contribution

BT - Optics InfoBase Conference Papers

ER -

Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry

Abstract

Fingerprint

Cite this