Abstract
A new Schwarzschild imaging objective has been designed and built to support 0.1 μm design rules in a 0.4 mm diameter field of view. Simulated imaging results based on measured wave-front errors are reported. A vacuum environment for soft-x-ray imaging experiments is described.
| Original language | English |
|---|---|
| Title of host publication | Optics InfoBase Conference Papers |
| Pages | 79-82 |
| Number of pages | 4 |
| State | Published - Jan 1 1993 |
| Externally published | Yes |
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