Development and Characterization of a 10x Schwarzschild System for Soft-X-Ray Projection Lithography

D. A. Tichenor; G. D. Kubiak; M. E. Malinowski; R. H. Stulen; S. J. Haney; K. W. Berger; R. P. Nissen; R. L. Schmitt; G. A. Wilkerson; L. A. Brown; P. A. Spence; P. S. Jin; W. C. Sweatt; W. W. Chow; J. E. Bjorkholm; R. R. Freeman; M. D. Himel; A. A. MacDowell; D. M. Tennant; O. R. Wood; W. K. Waskiewicz; D. L. White; D. L. Windt; T. E. Jewell

Development and Characterization of a 10x Schwarzschild System for Soft-X-Ray Projection Lithography

D. A. Tichenor
, G. D. Kubiak
, M. E. Malinowski
, R. H. Stulen
, S. J. Haney
, K. W. Berger
, R. P. Nissen
, R. L. Schmitt
, G. A. Wilkerson
, L. A. Brown
, P. A. Spence
, P. S. Jin
, W. C. Sweatt
, W. W. Chow
, J. E. Bjorkholm
, R. R. Freeman
, M. D. Himel
, A. A. MacDowell
, D. M. Tennant
, O. R. Wood

W. K. Waskiewicz, D. L. White, D. L. Windt, T. E. Jewell

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Optics InfoBase Conference Papers
State	Published - Jan 1 1993
Externally published	Yes

Cite this

Tichenor, D. A., Kubiak, G. D., Malinowski, M. E., Stulen, R. H., Haney, S. J., Berger, K. W., Nissen, R. P., Schmitt, R. L., Wilkerson, G. A., Brown, L. A., Spence, P. A., Jin, P. S., Sweatt, W. C., Chow, W. W., Bjorkholm, J. E., Freeman, R. R., Himel, M. D., MacDowell, A. A., Tennant, D. M., ... Jewell, T. E. (1993). Development and Characterization of a 10x Schwarzschild System for Soft-X-Ray Projection Lithography. In Optics InfoBase Conference Papers

@inproceedings{1bf0e7fb8b5748889eeaf0420e0b249b,

title = "Development and Characterization of a 10x Schwarzschild System for Soft-X-Ray Projection Lithography",

author = "Tichenor, \{D. A.\} and Kubiak, \{G. D.\} and Malinowski, \{M. E.\} and Stulen, \{R. H.\} and Haney, \{S. J.\} and Berger, \{K. W.\} and Nissen, \{R. P.\} and Schmitt, \{R. L.\} and Wilkerson, \{G. A.\} and Brown, \{L. A.\} and Spence, \{P. A.\} and Jin, \{P. S.\} and Sweatt, \{W. C.\} and Chow, \{W. W.\} and Bjorkholm, \{J. E.\} and Freeman, \{R. R.\} and Himel, \{M. D.\} and MacDowell, \{A. A.\} and Tennant, \{D. M.\} and Wood, \{O. R.\} and Waskiewicz, \{W. K.\} and White, \{D. L.\} and Windt, \{D. L.\} and Jewell, \{T. E.\}",

year = "1993",

month = jan,

day = "1",

language = "English",

booktitle = "Optics InfoBase Conference Papers",

}

Tichenor, DA, Kubiak, GD, Malinowski, ME, Stulen, RH, Haney, SJ, Berger, KW, Nissen, RP, Schmitt, RL, Wilkerson, GA, Brown, LA, Spence, PA, Jin, PS, Sweatt, WC, Chow, WW, Bjorkholm, JE, Freeman, RR, Himel, MD, MacDowell, AA, Tennant, DM, Wood, OR, Waskiewicz, WK, White, DL, Windt, DL & Jewell, TE 1993, Development and Characterization of a 10x Schwarzschild System for Soft-X-Ray Projection Lithography. in Optics InfoBase Conference Papers.

TY - GEN

T1 - Development and Characterization of a 10x Schwarzschild System for Soft-X-Ray Projection Lithography

AU - Tichenor, D. A.

AU - Kubiak, G. D.

AU - Malinowski, M. E.

AU - Stulen, R. H.

AU - Haney, S. J.

AU - Berger, K. W.

AU - Nissen, R. P.

AU - Schmitt, R. L.

AU - Wilkerson, G. A.

AU - Brown, L. A.

AU - Spence, P. A.

AU - Jin, P. S.

AU - Sweatt, W. C.

AU - Chow, W. W.

AU - Bjorkholm, J. E.

AU - Freeman, R. R.

AU - Himel, M. D.

AU - MacDowell, A. A.

AU - Tennant, D. M.

AU - Wood, O. R.

AU - Waskiewicz, W. K.

AU - White, D. L.

AU - Windt, D. L.

AU - Jewell, T. E.

PY - 1993/1/1

Y1 - 1993/1/1

UR - https://www.scopus.com/pages/publications/85135483679

M3 - Conference contribution

BT - Optics InfoBase Conference Papers

ER -