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Direct simulation of next generation devices by atomistic simulation

  • Christopher Meli
  • , Jeremy Broughton
  • , Priya Vashishta
  • , Rajiv Kalia

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Devices that rely upon mechanical principles can be built in the microscale regime using technology developed for electronic device fabrication. Such devices are the quartz crystal oscillators (QCO's). These devices rely upon the very simple mechanical principles for their operation. As technology advances, these devices will be manufactured in the 100 micron length scale regime or even in the sub-micron regime. This size regime can be directly assessed by modern atomistic simulation. Such simulation both quantitatively and qualitatively answer many device-related questions.
Original languageEnglish
Title of host publicationProceedings of the Annual IEEE International Frequency Control Symposium
Pages870-872
Number of pages3
StatePublished - Dec 1 1995
Externally publishedYes

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