Abstract
Devices that rely upon mechanical principles can be built in the microscale regime using technology developed for electronic device fabrication. Such devices are the quartz crystal oscillators (QCO's). These devices rely upon the very simple mechanical principles for their operation. As technology advances, these devices will be manufactured in the 100 micron length scale regime or even in the sub-micron regime. This size regime can be directly assessed by modern atomistic simulation. Such simulation both quantitatively and qualitatively answer many device-related questions.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the Annual IEEE International Frequency Control Symposium |
| Pages | 870-872 |
| Number of pages | 3 |
| State | Published - Dec 1 1995 |
| Externally published | Yes |
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