Dynamic membrane projection lithography [invited]

We present dynamic membrane projection lithography as a method to create three dimensional metallic traces in hemispherical cavities. The technique entails directional evaporation through perforations in a membrane covering a hemispherical unit-cell cavity. The sample is positioned on a rotating stage and tilted with respect to the incident evaporated beam, such that the traces are deposited on the interior face of the cavity. A simple self-aligned version and a more general two-step fabrication version are presented. Furthermore, by incorporating a fixed shutter, both closed-loop and split-loop structures are demonstrated. © 2011 Optical Society of America.