@article{f83014040c1e41e0b97a15d557923ef2,
title = "Effect of Dopants, Impurities, and Substrate on Anomalous Crystallization of SiN",
author = "Calvin Parkin and Paul Kotula and Jennie Podlevsky and Carlos Chacon and Edwin Chiu and Scott Grutzik and Aashique Rezwan and Tesia Janicki and Lane, \{J. Matthew D.\} and Hojun Lim and Chris Bishop and Khalid Hattar",
year = "2023",
month = jul,
day = "22",
doi = "10.1093/micmic/ozad067.755",
language = "English",
volume = "29",
pages = "1470--1471",
journal = "Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada",
issn = "1435-8115",
number = "1",
}