Effects of dose rate on the electrical conductivity of ion implanted polymers

Yongqiang Wang; L. B. Bridwell; R. E. Giedd; M. J. Murphy

doi:10.1016/0168-583X(91)96119-6

Effects of dose rate on the electrical conductivity of ion implanted polymers

Yongqiang Wang
, L. B. Bridwell
, R. E. Giedd
, M. J. Murphy

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

Several kinds of polymers were implanted by 50 keV nitrogen (N⁺ and N⁺₂) with different dose rates (0.16-2.03 μA/cm²). The resistivity was measured using a constant voltage method. The dose rate was found to significantly influence the resistivities of implanted polymers. The temperature of the targets at the end of the implant was more dependent upon the total fluence than the dose rate. While some variation of resistances of the conducting layer was observed for different implant dose rates, no blistering or bubble formation occurred under these conditions. The dose rate was found to also affect the current-voltage characteristic and temperature-dependent resistivity of implanted polymers.

Original language	English
Pages (from-to)	660-663
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	56-57
Issue number	PART 1
DOIs	https://doi.org/10.1016/0168-583X(91)96119-6
State	Published - May 1 1991
Externally published	Yes

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title = "Effects of dose rate on the electrical conductivity of ion implanted polymers",

abstract = "Several kinds of polymers were implanted by 50 keV nitrogen (N+ and N+2) with different dose rates (0.16-2.03 μA/cm2). The resistivity was measured using a constant voltage method. The dose rate was found to significantly influence the resistivities of implanted polymers. The temperature of the targets at the end of the implant was more dependent upon the total fluence than the dose rate. While some variation of resistances of the conducting layer was observed for different implant dose rates, no blistering or bubble formation occurred under these conditions. The dose rate was found to also affect the current-voltage characteristic and temperature-dependent resistivity of implanted polymers.",

author = "Yongqiang Wang and Bridwell, \{L. B.\} and Giedd, \{R. E.\} and Murphy, \{M. J.\}",

year = "1991",

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doi = "10.1016/0168-583X(91)96119-6",

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TY - JOUR

T1 - Effects of dose rate on the electrical conductivity of ion implanted polymers

AU - Wang, Yongqiang

AU - Bridwell, L. B.

AU - Giedd, R. E.

AU - Murphy, M. J.

PY - 1991/5/1

Y1 - 1991/5/1

N2 - Several kinds of polymers were implanted by 50 keV nitrogen (N+ and N+2) with different dose rates (0.16-2.03 μA/cm2). The resistivity was measured using a constant voltage method. The dose rate was found to significantly influence the resistivities of implanted polymers. The temperature of the targets at the end of the implant was more dependent upon the total fluence than the dose rate. While some variation of resistances of the conducting layer was observed for different implant dose rates, no blistering or bubble formation occurred under these conditions. The dose rate was found to also affect the current-voltage characteristic and temperature-dependent resistivity of implanted polymers.

AB - Several kinds of polymers were implanted by 50 keV nitrogen (N+ and N+2) with different dose rates (0.16-2.03 μA/cm2). The resistivity was measured using a constant voltage method. The dose rate was found to significantly influence the resistivities of implanted polymers. The temperature of the targets at the end of the implant was more dependent upon the total fluence than the dose rate. While some variation of resistances of the conducting layer was observed for different implant dose rates, no blistering or bubble formation occurred under these conditions. The dose rate was found to also affect the current-voltage characteristic and temperature-dependent resistivity of implanted polymers.

UR - https://www.scopus.com/pages/publications/0009192956

U2 - 10.1016/0168-583X(91)96119-6

DO - 10.1016/0168-583X(91)96119-6

M3 - Article

SN - 0168-583X

VL - 56-57

SP - 660

EP - 663

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - PART 1

ER -

Effects of dose rate on the electrical conductivity of ion implanted polymers

Abstract

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