Effects of relative humidity and actuation voltage on MEMS reliability

M. Hon; F. W. DelRio; C. Carraro; R. Maboudian

doi:10.1109/SENSOR.2007.4300144

Effects of relative humidity and actuation voltage on MEMS reliability

M. Hon
, F. W. DelRio
, C. Carraro
, R. Maboudian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

Polycrystalline silicon (polysilicon) microelectromechanical systems (MEMS) commonly operate under high electric fields. When combined with humidity from the environment, corrosion becomes a critical reliability issue. Oxidation at the anode is frequently observed and reported. In this paper, we provide the first report of damage occurring at the cathode in polysilicon MEMS under high relative humidity. This unusual phenomenon is determined to be electrochemical and chemical in nature. The accelerating factors leading to cathodic dissolution are discussed and suggestions to prevent such damage are presented. ©2007 IEEE.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	367-370
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300144
State	Published - Dec 1 2007
Externally published	Yes

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10.1109/SENSOR.2007.4300144

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title = "Effects of relative humidity and actuation voltage on MEMS reliability",

abstract = "Polycrystalline silicon (polysilicon) microelectromechanical systems (MEMS) commonly operate under high electric fields. When combined with humidity from the environment, corrosion becomes a critical reliability issue. Oxidation at the anode is frequently observed and reported. In this paper, we provide the first report of damage occurring at the cathode in polysilicon MEMS under high relative humidity. This unusual phenomenon is determined to be electrochemical and chemical in nature. The accelerating factors leading to cathodic dissolution are discussed and suggestions to prevent such damage are presented. {\textcopyright}2007 IEEE.",

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AU - Hon, M.

AU - DelRio, F. W.

AU - Carraro, C.

AU - Maboudian, R.

PY - 2007/12/1

Y1 - 2007/12/1

N2 - Polycrystalline silicon (polysilicon) microelectromechanical systems (MEMS) commonly operate under high electric fields. When combined with humidity from the environment, corrosion becomes a critical reliability issue. Oxidation at the anode is frequently observed and reported. In this paper, we provide the first report of damage occurring at the cathode in polysilicon MEMS under high relative humidity. This unusual phenomenon is determined to be electrochemical and chemical in nature. The accelerating factors leading to cathodic dissolution are discussed and suggestions to prevent such damage are presented. ©2007 IEEE.

AB - Polycrystalline silicon (polysilicon) microelectromechanical systems (MEMS) commonly operate under high electric fields. When combined with humidity from the environment, corrosion becomes a critical reliability issue. Oxidation at the anode is frequently observed and reported. In this paper, we provide the first report of damage occurring at the cathode in polysilicon MEMS under high relative humidity. This unusual phenomenon is determined to be electrochemical and chemical in nature. The accelerating factors leading to cathodic dissolution are discussed and suggestions to prevent such damage are presented. ©2007 IEEE.

UR - https://www.scopus.com/pages/publications/44849138533

U2 - 10.1109/SENSOR.2007.4300144

DO - 10.1109/SENSOR.2007.4300144

M3 - Conference contribution

SN - 1424408423

SN - 9781424408429

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EP - 370

BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

ER -

Effects of relative humidity and actuation voltage on MEMS reliability

Abstract

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