Abstract
We report on optical characteristics as well as electron emission of hydrogen-plasma treated ZnO nanoneedle arrays. The nanoneedle arrays were vertically grown on Si substrates using catalyst-free metalorganic chemical vapor deposition and subsequently treated by hydrogen plasma at room temperature. After hydrogen plasma treatment, the field emission characteristic curves of nanoneedle arrays exhibited significantly reduced turn-on field and increased emission current density, and the electrical conductivity was increased. In addition, low temperature photoluminesence (PL) measurements indicate that a neutral-donor bound exciton PL peak intensity was increased by the hydrogen- plasma treatment. These effects of the plasma treatment on the physical properties may be explained in terms of hydrogen doping effect.
| Original language | English |
|---|---|
| Pages (from-to) | 1970-1974 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 23 |
| Issue number | 5 |
| DOIs | |
| State | Published - Dec 1 2005 |
| Externally published | Yes |
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