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Electron mobility enhancement in an undoped Si/SiGe heterostructure by remote carrier screening

  • Yi Hsin Su
  • , Kuan Yu Chou
  • , Yen Chuang
  • , Tzu Ming Lu
  • , Jiun Yun Li

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

We investigate the effects of surface tunneling on electrostatics and transport properties of two-dimensional electron gases (2DEGs) in undoped Si/SiGe heterostructures with different 2DEG depths. By varying the gate voltage, four stages of density-mobility dependence are identified with two density saturation regimes observed, which confirms that the system transitions between equilibrium and nonequilibrium. Mobility is enhanced with an increasing density at low biases and, counterintuitively, with a decreasing density at high biases as well. The density saturation and mobility enhancement can be semiquantitatively explained by a surface tunneling model in combination with a bilayer screening theory.
Original languageEnglish
JournalJournal of Applied Physics
Volume125
Issue number23
DOIs
StatePublished - Jun 21 2019
Externally publishedYes

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