Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes

Chuan Pu; Sangtae Park; P. Chu; Shi Sheng Lee; D. Peale; N. Bonadeo; I. Brener

doi:10.1109/OMEMS.2003.1233500

Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes

Chuan Pu
, Sangtae Park
, P. Chu
, Shi Sheng Lee
, D. Peale
, N. Bonadeo
, I. Brener

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

We have successfully demonstrated sidewall-electrode actuation of 3-D MEMS mirrors. Improved actuation linearity and reduction of the spring-softening effect are achieved. Sidewall actuation enables better mirror dynamics including large snap-down angles, reduced driving voltages, and fast switching times.

Original language	English
Title of host publication	2003 IEEE/LEOS International Conference on Optical MEMS
Pages	129-130
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2003.1233500
State	Published - Jan 1 2003
Externally published	Yes

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title = "Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes",

abstract = "We have successfully demonstrated sidewall-electrode actuation of 3-D MEMS mirrors. Improved actuation linearity and reduction of the spring-softening effect are achieved. Sidewall actuation enables better mirror dynamics including large snap-down angles, reduced driving voltages, and fast switching times.",

author = "Chuan Pu and Sangtae Park and P. Chu and Lee, \{Shi Sheng\} and D. Peale and N. Bonadeo and I. Brener",

year = "2003",

month = jan,

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doi = "10.1109/OMEMS.2003.1233500",

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AU - Pu, Chuan

AU - Park, Sangtae

AU - Chu, P.

AU - Lee, Shi Sheng

AU - Peale, D.

AU - Bonadeo, N.

AU - Brener, I.

PY - 2003/1/1

Y1 - 2003/1/1

N2 - We have successfully demonstrated sidewall-electrode actuation of 3-D MEMS mirrors. Improved actuation linearity and reduction of the spring-softening effect are achieved. Sidewall actuation enables better mirror dynamics including large snap-down angles, reduced driving voltages, and fast switching times.

AB - We have successfully demonstrated sidewall-electrode actuation of 3-D MEMS mirrors. Improved actuation linearity and reduction of the spring-softening effect are achieved. Sidewall actuation enables better mirror dynamics including large snap-down angles, reduced driving voltages, and fast switching times.

UR - https://www.scopus.com/pages/publications/21844472399

U2 - 10.1109/OMEMS.2003.1233500

DO - 10.1109/OMEMS.2003.1233500

M3 - Conference contribution

SN - 078037830X

SN - 9780780378308

SP - 129

EP - 130

BT - 2003 IEEE/LEOS International Conference on Optical MEMS

ER -

Electrostatic actuation of 3-D MEMS mirrors by sidewall electrodes

Abstract

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