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Epitaxial ternary nitride thin films prepared by a chemical solution method

  • Hongmei Luo
  • , Haiyan Wang
  • , Zhenxing Bi
  • , David M. Feldmann
  • , Yongqiang Wang
  • , Anthony K. Burrell
  • , Thomas Mark Mccleskey
  • , Eve Bauer
  • , Marilyn E. Hawley
  • , Quanxi Jia

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

It is indispensable to use thin films for many technological applications. This is the first report of epitaxial growth of ternary nitride AMN2 films. Epitaxial tetragonal SrTiN2 films have been successfully prepared by a chemical solution approach, polymer-assisted deposition. The structural, electrical, and optical properties of the films are also investigated.

Original languageEnglish
Pages (from-to)15224-15225
Number of pages2
JournalJournal of the American Chemical Society
Volume130
Issue number46
DOIs
StatePublished - Nov 19 2008

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