Abstract
Superconducting nanostripe single-photon detectors (SNSPDs) represent key components in silicon quantum photonic integrated circuits (SiQuPICs). They provide good timing precision, low dark counts, and high efficiency. The design, fabrication, and characterization of SiQuPICs comprising SNSPDs coupled to dielectric optical waveguides are the core objectives of our work. The detectors are positioned directly on the dielectric waveguide core to increase photon absorption by the superconducting nanostripes. We also present results on the SPICE circuit modeling of traveling-wave SNSPDs integrated with Si3N4/SiO2 optical waveguides.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 12415 |
| DOIs | |
| State | Published - Jan 1 2023 |
| Externally published | Yes |
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