Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography.

D. Bruce Burckel; Joel R. Wendt; Gregory A. Ten Eyck; A. Robert Ellis; Igal Brener; Michael B. Sinclair

doi:10.1002/adma.200904153

Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography.

D. Bruce Burckel
, Joel R. Wendt
, Gregory A. Ten Eyck
, A. Robert Ellis
, Igal Brener
, Michael B. Sinclair

Research output: Contribution to journal › Article › peer-review

76 Scopus citations

Original language	English
Pages (from-to)	3171-3175
Number of pages	5
Journal	Advanced materials (Deerfield Beach, Fla.)
Volume	22
Issue number	29
DOIs	https://doi.org/10.1002/adma.200904153
State	Published - Jan 1 2010
Externally published	Yes

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10.1002/adma.200904153

Cite this

@article{ea09661d68b242d480b6b4eaa01bdcf7,

title = "Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography.",

author = "Burckel, \{D. Bruce\} and Wendt, \{Joel R.\} and \{Ten Eyck\}, \{Gregory A.\} and Ellis, \{A. Robert\} and Igal Brener and Sinclair, \{Michael B.\}",

year = "2010",

month = jan,

day = "1",

doi = "10.1002/adma.200904153",

language = "English",

volume = "22",

pages = "3171--3175",

journal = "Advanced materials (Deerfield Beach, Fla.)",

issn = "1521-4095",

number = "29",

}

TY - JOUR

T1 - Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography.

AU - Burckel, D. Bruce

AU - Wendt, Joel R.

AU - Ten Eyck, Gregory A.

AU - Ellis, A. Robert

AU - Brener, Igal

AU - Sinclair, Michael B.

PY - 2010/1/1

Y1 - 2010/1/1

UR - https://www.scopus.com/pages/publications/79952020194

U2 - 10.1002/adma.200904153

DO - 10.1002/adma.200904153

M3 - Article

SN - 1521-4095

VL - 22

SP - 3171

EP - 3175

JO - Advanced materials (Deerfield Beach, Fla.)

JF - Advanced materials (Deerfield Beach, Fla.)

IS - 29

ER -