Fabrication of cubic micron-scale 3D metamaterial resonators

D. Bruce Burcke; Greg A. Ten Eyck; Joel R. Wendt; Igal Brener; Michael B. Sinclair

Fabrication of cubic micron-scale 3D metamaterial resonators

D. Bruce Burcke
, Greg A. Ten Eyck
, Joel R. Wendt
, Igal Brener
, Michael B. Sinclair

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present a new fabrication technique called Membrane Projection Lithography for the production of three-dimensional metamaterials at infrared wavelengths. Using this technique, multilayer infrared metamaterials that include both in-plane and out-of-plane resonators can be fabricated. © 2010 Optical Society of America.

Original language	English
Title of host publication	Optics InfoBase Conference Papers
State	Published - Dec 1 2010
Externally published	Yes

Cite this

@inproceedings{e634abf7ce9a41188d8160c25ed4027e,

title = "Fabrication of cubic micron-scale 3D metamaterial resonators",

abstract = "We present a new fabrication technique called Membrane Projection Lithography for the production of three-dimensional metamaterials at infrared wavelengths. Using this technique, multilayer infrared metamaterials that include both in-plane and out-of-plane resonators can be fabricated. {\textcopyright} 2010 Optical Society of America.",

author = "\{Bruce Burcke\}, D. and \{Ten Eyck\}, \{Greg A.\} and Wendt, \{Joel R.\} and Igal Brener and Sinclair, \{Michael B.\}",

year = "2010",

month = dec,

day = "1",

language = "English",

isbn = "9781557528926",

booktitle = "Optics InfoBase Conference Papers",

}

TY - GEN

T1 - Fabrication of cubic micron-scale 3D metamaterial resonators

AU - Bruce Burcke, D.

AU - Ten Eyck, Greg A.

AU - Wendt, Joel R.

AU - Brener, Igal

AU - Sinclair, Michael B.

PY - 2010/12/1

Y1 - 2010/12/1

N2 - We present a new fabrication technique called Membrane Projection Lithography for the production of three-dimensional metamaterials at infrared wavelengths. Using this technique, multilayer infrared metamaterials that include both in-plane and out-of-plane resonators can be fabricated. © 2010 Optical Society of America.

AB - We present a new fabrication technique called Membrane Projection Lithography for the production of three-dimensional metamaterials at infrared wavelengths. Using this technique, multilayer infrared metamaterials that include both in-plane and out-of-plane resonators can be fabricated. © 2010 Optical Society of America.

UR - https://www.scopus.com/pages/publications/84896781181

M3 - Conference contribution

SN - 9781557528926

BT - Optics InfoBase Conference Papers

ER -

Fabrication of cubic micron-scale 3D metamaterial resonators

Abstract

Fingerprint

Cite this