@inproceedings{f720f600121c4322bb0ae7d37f72b47b,
title = "Flexible, large-area metamaterials fabricated on thin silicon nitride membranes",
abstract = "We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs.",
author = "Peralta, \{X. G.\} and Arrington, \{C. L.\} and Wanke, \{M. C.\} and I. Brener and Williams, \{J. D.\} and E. Smirnova and Taylor, \{Antoinette Jane\} and A. Strikwerda and Averitt, \{R. D.\} and Padilla, \{W. J.\} and O'Hara, \{J. F.\}",
year = "2008",
month = sep,
day = "15",
doi = "10.1109/CLEO.2008.4551092",
language = "English",
isbn = "1557528594",
series = "Optics InfoBase Conference Papers",
publisher = "Unknown Publisher",
booktitle = "Conference on Lasers and Electro-Optics, CLEO 2008",
note = "2008 Conference on Lasers and Electro-Optics, CLEO 2008 ; Conference date: 15-09-2008",
}