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Flexible, large-area metamaterials fabricated on thin silicon nitride membranes

  • X. G. Peralta
  • , C. L. Arrington
  • , M. C. Wanke
  • , I. Brener
  • , J. D. Williams
  • , E. Smirnova
  • , Antoinette Jane Taylor
  • , A. Strikwerda
  • , R. D. Averitt
  • , W. J. Padilla
  • , J. F. O'Hara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present terahertz metamaterials fabricated on large-area, free-standing thin (≤1 μm) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2008
PublisherUnknown Publisher
ISBN (Print)1557528594, 9781557528599
DOIs
StatePublished - Sep 15 2008
Event2008 Conference on Lasers and Electro-Optics, CLEO 2008 -
Duration: Sep 15 2008 → …

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

Conference2008 Conference on Lasers and Electro-Optics, CLEO 2008
Period09/15/08 → …

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