Fracture in silicon nitride and alumina thin films: A molecular dynamics study

Timothy J. Campbell; Aiichiro Nakano; Andrey Omeltchenko; Rajiv K. Kalia; Priya Vashishta

Fracture in silicon nitride and alumina thin films: A molecular dynamics study

Timothy J. Campbell
, Aiichiro Nakano
, Andrey Omeltchenko
, Rajiv K. Kalia
, Priya Vashishta

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Fracture in thin films of silicon nitride and alumina is investigated with large-scale multiresolution molecular-dynamics (MD) simulations on parallel computers. The simulations for alumina include dynamic charge transfer effects based on electronegativity equalization. Results for structural and dynamic correlations and the effects of temperature and orientation of film on fracture dynamics and morphology of fracture surfaces are presented.

Original language	English
Title of host publication	Materials Research Society Symposium - Proceedings
Pages	163-168
Number of pages	6
Volume	446
State	Published - Jan 1 1997
Externally published	Yes

Cite this

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title = "Fracture in silicon nitride and alumina thin films: A molecular dynamics study",

abstract = "Fracture in thin films of silicon nitride and alumina is investigated with large-scale multiresolution molecular-dynamics (MD) simulations on parallel computers. The simulations for alumina include dynamic charge transfer effects based on electronegativity equalization. Results for structural and dynamic correlations and the effects of temperature and orientation of film on fracture dynamics and morphology of fracture surfaces are presented.",

author = "Campbell, \{Timothy J.\} and Aiichiro Nakano and Andrey Omeltchenko and Kalia, \{Rajiv K.\} and Priya Vashishta",

year = "1997",

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language = "English",

volume = "446",

pages = "163--168",

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T1 - Fracture in silicon nitride and alumina thin films: A molecular dynamics study

AU - Campbell, Timothy J.

AU - Nakano, Aiichiro

AU - Omeltchenko, Andrey

AU - Kalia, Rajiv K.

AU - Vashishta, Priya

PY - 1997/1/1

Y1 - 1997/1/1

N2 - Fracture in thin films of silicon nitride and alumina is investigated with large-scale multiresolution molecular-dynamics (MD) simulations on parallel computers. The simulations for alumina include dynamic charge transfer effects based on electronegativity equalization. Results for structural and dynamic correlations and the effects of temperature and orientation of film on fracture dynamics and morphology of fracture surfaces are presented.

AB - Fracture in thin films of silicon nitride and alumina is investigated with large-scale multiresolution molecular-dynamics (MD) simulations on parallel computers. The simulations for alumina include dynamic charge transfer effects based on electronegativity equalization. Results for structural and dynamic correlations and the effects of temperature and orientation of film on fracture dynamics and morphology of fracture surfaces are presented.

UR - https://www.scopus.com/pages/publications/0030676606

M3 - Conference contribution

VL - 446

SP - 163

EP - 168

BT - Materials Research Society Symposium - Proceedings

ER -

Fracture in silicon nitride and alumina thin films: A molecular dynamics study

Abstract

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