Frequency Noise of Silicon Nitride Optomechanical Oscillators with Integrated Waveguides

Alejandro Grine; Darwin Serkland; Michael Wood; Amy Soudachanh; Andrew Hollowell; Lawrence Koch; Christopher Hains; Aleem Siddiqui; Matt Eichenfield; Daryl Dagel; Grant Grossetete; Benjamin Matins

doi:10.1109/OMN.2018.8454597

Frequency Noise of Silicon Nitride Optomechanical Oscillators with Integrated Waveguides

Alejandro Grine
, Darwin Serkland
, Michael Wood
, Amy Soudachanh
, Andrew Hollowell
, Lawrence Koch
, Christopher Hains
, Aleem Siddiqui
, Matt Eichenfield
, Daryl Dagel
, Grant Grossetete
, Benjamin Matins

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

We demonstrate silicon nitride cavity optomechanical oscillators fabricated in a planar process adjacent to integrated coupling waveguides. Allan deviation of the mechanical oscillation frequency was characterized using a free-space optical setup in air. The device exhibited a frequency instability of 78 parts per billion at an averaging time of 130ms and fractional short-Term instability of 2x10-8/τ1/2. Benefits of the fabrication process include all-stepper lithography, planar topology, wafer-scale wet release, and waveguide facets formed by 220μm deep dry etching. Optical Q > 2million and mechanical Q= 1450 at 58MHz in air were obtained in initial samples.

Original language	English
Title of host publication	International Conference on Optical MEMS and Nanophotonics
Volume	2018-July
DOIs	https://doi.org/10.1109/OMN.2018.8454597
State	Published - Sep 4 2018
Externally published	Yes

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Grine, A., Serkland, D., Wood, M., Soudachanh, A., Hollowell, A., Koch, L., Hains, C., Siddiqui, A., Eichenfield, M., Dagel, D., Grossetete, G., & Matins, B. (2018). Frequency Noise of Silicon Nitride Optomechanical Oscillators with Integrated Waveguides. In International Conference on Optical MEMS and Nanophotonics (Vol. 2018-July) https://doi.org/10.1109/OMN.2018.8454597

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title = "Frequency Noise of Silicon Nitride Optomechanical Oscillators with Integrated Waveguides",

abstract = "We demonstrate silicon nitride cavity optomechanical oscillators fabricated in a planar process adjacent to integrated coupling waveguides. Allan deviation of the mechanical oscillation frequency was characterized using a free-space optical setup in air. The device exhibited a frequency instability of 78 parts per billion at an averaging time of 130ms and fractional short-Term instability of 2x10-8/τ1/2. Benefits of the fabrication process include all-stepper lithography, planar topology, wafer-scale wet release, and waveguide facets formed by 220μm deep dry etching. Optical Q > 2million and mechanical Q= 1450 at 58MHz in air were obtained in initial samples.",

author = "Alejandro Grine and Darwin Serkland and Michael Wood and Amy Soudachanh and Andrew Hollowell and Lawrence Koch and Christopher Hains and Aleem Siddiqui and Matt Eichenfield and Daryl Dagel and Grant Grossetete and Benjamin Matins",

year = "2018",

month = sep,

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doi = "10.1109/OMN.2018.8454597",

language = "English",

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T1 - Frequency Noise of Silicon Nitride Optomechanical Oscillators with Integrated Waveguides

AU - Grine, Alejandro

AU - Serkland, Darwin

AU - Wood, Michael

AU - Soudachanh, Amy

AU - Hollowell, Andrew

AU - Koch, Lawrence

AU - Hains, Christopher

AU - Siddiqui, Aleem

AU - Eichenfield, Matt

AU - Dagel, Daryl

AU - Grossetete, Grant

AU - Matins, Benjamin

PY - 2018/9/4

Y1 - 2018/9/4

N2 - We demonstrate silicon nitride cavity optomechanical oscillators fabricated in a planar process adjacent to integrated coupling waveguides. Allan deviation of the mechanical oscillation frequency was characterized using a free-space optical setup in air. The device exhibited a frequency instability of 78 parts per billion at an averaging time of 130ms and fractional short-Term instability of 2x10-8/τ1/2. Benefits of the fabrication process include all-stepper lithography, planar topology, wafer-scale wet release, and waveguide facets formed by 220μm deep dry etching. Optical Q > 2million and mechanical Q= 1450 at 58MHz in air were obtained in initial samples.

AB - We demonstrate silicon nitride cavity optomechanical oscillators fabricated in a planar process adjacent to integrated coupling waveguides. Allan deviation of the mechanical oscillation frequency was characterized using a free-space optical setup in air. The device exhibited a frequency instability of 78 parts per billion at an averaging time of 130ms and fractional short-Term instability of 2x10-8/τ1/2. Benefits of the fabrication process include all-stepper lithography, planar topology, wafer-scale wet release, and waveguide facets formed by 220μm deep dry etching. Optical Q > 2million and mechanical Q= 1450 at 58MHz in air were obtained in initial samples.

UR - https://www.scopus.com/pages/publications/85053904064

U2 - 10.1109/OMN.2018.8454597

DO - 10.1109/OMN.2018.8454597

M3 - Conference contribution

SN - 9781509063727

VL - 2018-July

BT - International Conference on Optical MEMS and Nanophotonics

ER -

Frequency Noise of Silicon Nitride Optomechanical Oscillators with Integrated Waveguides

Abstract

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