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GaInN/GaN growth optimization for high-power green light-emitting diodes

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72 Scopus citations

Abstract

The growth optimization for high-power green light-emitting diodes (LED) was investigated using Ga 1-xIn xN/GaN metalorganic vapor phase epitaxy. An Emcore D-180 Spectra GaN rotating disk multiwafer system was used for growth of LED epiwafers by metalorganic vapor phase epitaxy. An optimization of nitride epitaxy resulted in development of high brightness 525 nm green LED dies after mesa etching, metalization, thinning, separation and mounting on heat sinks. The results show die performance of 2.5 mW at 523 nm for low forward voltages of 3.4 V at typical drive current of 20 mA.
Original languageEnglish
Pages (from-to)866-868
Number of pages3
JournalApplied Physics Letters
Volume85
Issue number6
DOIs
StatePublished - Aug 9 2004
Externally publishedYes

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