Abstract
For technology scaling issues, the use of high-K as dielectric has been adopted as device-level solution. The use of graphene in transistor structure is being evaluated. The previous chapter focused on these aspects. This chapter also discusses a material level solution of technology scaling and focuses on the use of compound semiconductor with Si to solve the challenges of technology scaling.
| Original language | English |
|---|---|
| DOIs | |
| State | Published - Jan 1 2016 |
| Externally published | Yes |
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