Abstract
Quantitative hydrogen analysis using elastic recoil detection (ERD) usually requires the use for a hydrogen standard. In this paper, we first discuss how to correctly use primary hydrogen standards (Kapton and H-implant in Si) through a real example in which Kapton is used to determine the absolute implant-dose in a H-implanted Si target. Second part of the paper is devoted to discussing secondary hydrogen standards. Two types of hydrogen-containing thin films are investigated: H- and D-loaded erbium thin film and ion implanted polymer thin film. The results indicate that both these thin films have high and stable hydrogen content and are suitable as hydrogen thin film standards in ERD analysis.
| Original language | English |
|---|---|
| Pages (from-to) | 115-124 |
| Number of pages | 10 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 219-220 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - Jun 1 2004 |
| Event | Proceedings of the Sixteenth International Conference on Ion - Duration: Jun 1 2004 → … |
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