Abstract
Significant composition-dependent incorporation of N into non-substitutional sites is often reported for dilute GaAsN alloys. To distinguish (N-N)As, (N-As)As, and (AsGa-NAs) complexes, we compare Rutherford backscattering spectrometry and nuclear reaction analysis (NRA) spectra with Monte Carlo-Molecular Dynamics simulations along the [100], [110], and [111] directions. For the Monte Carlo simulation, we assume that (N-N)As is aligned along the [111] direction, while (N-As)As is aligned along the [010] direction. The measured channeling NRA spectra exhibit the highest (lowest) yield in the [111] ([100]) directions. Similar trends are observed for simulations of (N-As)As, suggesting that (N-As)As is the dominant interstitial complex in dilute GaAsN.
| Original language | English |
|---|---|
| Article number | 221904 |
| Journal | Applied Physics Letters |
| Volume | 107 |
| Issue number | 22 |
| DOIs | |
| State | Published - Nov 30 2015 |
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