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In-situ regrowth of GaAs through controlled phase transformations and reactions of thin films on GaAs

  • D. A. Caldwell
  • , L. C. Chen
  • , A. H. Bensaoula
  • , J. K. Farrer
  • , C. B. Carter
  • , C. J. Palmstrom

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

In-situ depositions and reactions are utilized in the study of phase formation from solid phase reactions. We report on the formation of epitaxial GaAs and the formation of NiAs or Ni2Ga3 by the exposure of Ni3GaAs to As4 or Ga fluxes. In-situ annealing of Ni on MBE-grown GaAs leads to Ni3GaAs, and subsequent reaction with As4 or Ga drives regrowth of GaAs. The structures were analyzed by RBS, XRD, TEM, and in-situ electrical measurements.
Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
Pages455-460
Number of pages6
Volume514
StatePublished - Dec 1 1998
Externally publishedYes

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