Ion-beam assist nano-texturing of films

Vladimir Matias; Chris J Sheehan; Alp Tugrul Findikoglu

doi:10.1557/PROC-1020-GG02-04

Ion-beam assist nano-texturing of films

Vladimir Matias
, Chris J Sheehan
, Alp Tugrul Findikoglu

Los Alamos National Laboratory

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present an ion-beam based fabrication method for growth of single-crystal-like films that does not utilize epitaxy on single crystal substrates. We use ion-beam assisted texturing to obtain biaxial crystalline alignment in a film. This ion-beam assisted deposition (IBAD) texturing can be done on arbitrary, but smooth, substrates, including flexible polycrystalline metal tapes. With IBAD texturing of MgO and subsequent homoepitaxial growth we have demonstrated an in-plane mosaic spread FWHM as low as 2° and out-of-plane alignment of 1°. The deposition system we use includes reel-to-reel tape transport for a linear transport of substrate materials through the deposition zones. This allows for high-throughput experimentation via a linear combinatorial experimental design.

Original language	English
Title of host publication	Ion-Beam-Based Nanofabrication
Pages	49-53
Number of pages	5
DOIs	https://doi.org/10.1557/PROC-1020-GG02-04
State	Published - Dec 1 2007
Event	Ion-Beam-Based Nanofabrication - Duration: Dec 1 2007 → …

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	1020
ISSN (Print)	0272-9172

Conference

Conference	Ion-Beam-Based Nanofabrication
Period	12/1/07 → …

Access to Document

10.1557/PROC-1020-GG02-04

Cite this

@inproceedings{ed69bd15148541368d57dff47ea06a06,

title = "Ion-beam assist nano-texturing of films",

abstract = "We present an ion-beam based fabrication method for growth of single-crystal-like films that does not utilize epitaxy on single crystal substrates. We use ion-beam assisted texturing to obtain biaxial crystalline alignment in a film. This ion-beam assisted deposition (IBAD) texturing can be done on arbitrary, but smooth, substrates, including flexible polycrystalline metal tapes. With IBAD texturing of MgO and subsequent homoepitaxial growth we have demonstrated an in-plane mosaic spread FWHM as low as 2° and out-of-plane alignment of 1°. The deposition system we use includes reel-to-reel tape transport for a linear transport of substrate materials through the deposition zones. This allows for high-throughput experimentation via a linear combinatorial experimental design.",

author = "Vladimir Matias and Sheehan, \{Chris J\} and Findikoglu, \{Alp Tugrul\}",

year = "2007",

month = dec,

day = "1",

doi = "10.1557/PROC-1020-GG02-04",

language = "English",

isbn = "9781558999800",

series = "Materials Research Society Symposium Proceedings",

pages = "49--53",

booktitle = "Ion-Beam-Based Nanofabrication",

note = "Ion-Beam-Based Nanofabrication ; Conference date: 01-12-2007",

}

TY - GEN

T1 - Ion-beam assist nano-texturing of films

AU - Matias, Vladimir

AU - Sheehan, Chris J

AU - Findikoglu, Alp Tugrul

PY - 2007/12/1

Y1 - 2007/12/1

N2 - We present an ion-beam based fabrication method for growth of single-crystal-like films that does not utilize epitaxy on single crystal substrates. We use ion-beam assisted texturing to obtain biaxial crystalline alignment in a film. This ion-beam assisted deposition (IBAD) texturing can be done on arbitrary, but smooth, substrates, including flexible polycrystalline metal tapes. With IBAD texturing of MgO and subsequent homoepitaxial growth we have demonstrated an in-plane mosaic spread FWHM as low as 2° and out-of-plane alignment of 1°. The deposition system we use includes reel-to-reel tape transport for a linear transport of substrate materials through the deposition zones. This allows for high-throughput experimentation via a linear combinatorial experimental design.

AB - We present an ion-beam based fabrication method for growth of single-crystal-like films that does not utilize epitaxy on single crystal substrates. We use ion-beam assisted texturing to obtain biaxial crystalline alignment in a film. This ion-beam assisted deposition (IBAD) texturing can be done on arbitrary, but smooth, substrates, including flexible polycrystalline metal tapes. With IBAD texturing of MgO and subsequent homoepitaxial growth we have demonstrated an in-plane mosaic spread FWHM as low as 2° and out-of-plane alignment of 1°. The deposition system we use includes reel-to-reel tape transport for a linear transport of substrate materials through the deposition zones. This allows for high-throughput experimentation via a linear combinatorial experimental design.

UR - https://www.scopus.com/pages/publications/45749105891

U2 - 10.1557/PROC-1020-GG02-04

DO - 10.1557/PROC-1020-GG02-04

M3 - Conference contribution

SN - 9781558999800

T3 - Materials Research Society Symposium Proceedings

SP - 49

EP - 53

BT - Ion-Beam-Based Nanofabrication

T2 - Ion-Beam-Based Nanofabrication

Y2 - 1 December 2007

ER -

Ion-beam assist nano-texturing of films

Abstract

Publication series

Conference

Access to Document

Fingerprint

Cite this