Measurements of the stopping powers of He ions incident along the different channel axes and channel planes of Si

Lin Shao; Y. Q. Wang; M. Nastasi; J. W. Mayer

doi:10.1016/j.nimb.2006.03.021

Measurements of the stopping powers of He ions incident along the different channel axes and channel planes of Si

Lin Shao
, Y. Q. Wang
, M. Nastasi
, J. W. Mayer

Los Alamos National Laboratory

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

One serious issue limiting the accuracy of Rutherford backscattering spectrometry (RBS) is that the stopping powers of channeled and non-channeled particles differ substantially. Consequently, it brings errors not only in the energy-depth conversion of RBS spectra, but also in the quantitative analysis of the disorder profile. In this study, we present measurements of the stopping powers of ⁴He⁺ ions channeled along crystallographic axes of Si〈1 0 0〉, 〈1 1 0〉, 〈1 1 1〉, and also along crystallographic planes of (1 0 0) and (1 1 0) in the energy region of 0.6-2 MeV. The aim of this study is to provide an accurate energy-depth conversion for channeling RBS data.

Original language	English
Pages (from-to)	51-54
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	249
Issue number	1-2 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.nimb.2006.03.021
State	Published - Aug 1 2006

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10.1016/j.nimb.2006.03.021

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@article{96d571993eff483e9e76dc12818e6924,

title = "Measurements of the stopping powers of He ions incident along the different channel axes and channel planes of Si",

abstract = "One serious issue limiting the accuracy of Rutherford backscattering spectrometry (RBS) is that the stopping powers of channeled and non-channeled particles differ substantially. Consequently, it brings errors not only in the energy-depth conversion of RBS spectra, but also in the quantitative analysis of the disorder profile. In this study, we present measurements of the stopping powers of 4He+ ions channeled along crystallographic axes of Si〈1 0 0〉, 〈1 1 0〉, 〈1 1 1〉, and also along crystallographic planes of (1 0 0) and (1 1 0) in the energy region of 0.6-2 MeV. The aim of this study is to provide an accurate energy-depth conversion for channeling RBS data.",

author = "Lin Shao and Wang, \{Y. Q.\} and M. Nastasi and Mayer, \{J. W.\}",

year = "2006",

month = aug,

day = "1",

doi = "10.1016/j.nimb.2006.03.021",

language = "English",

volume = "249",

pages = "51--54",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier B.V.",

number = "1-2 SPEC. ISS.",

}

Measurements of the stopping powers of He ions incident along the different channel axes and channel planes of Si. / Shao, Lin; Wang, Y. Q.; Nastasi, M. et al.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 249, No. 1-2 SPEC. ISS., 01.08.2006, p. 51-54.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Measurements of the stopping powers of He ions incident along the different channel axes and channel planes of Si

AU - Shao, Lin

AU - Wang, Y. Q.

AU - Nastasi, M.

AU - Mayer, J. W.

PY - 2006/8/1

Y1 - 2006/8/1

N2 - One serious issue limiting the accuracy of Rutherford backscattering spectrometry (RBS) is that the stopping powers of channeled and non-channeled particles differ substantially. Consequently, it brings errors not only in the energy-depth conversion of RBS spectra, but also in the quantitative analysis of the disorder profile. In this study, we present measurements of the stopping powers of 4He+ ions channeled along crystallographic axes of Si〈1 0 0〉, 〈1 1 0〉, 〈1 1 1〉, and also along crystallographic planes of (1 0 0) and (1 1 0) in the energy region of 0.6-2 MeV. The aim of this study is to provide an accurate energy-depth conversion for channeling RBS data.

AB - One serious issue limiting the accuracy of Rutherford backscattering spectrometry (RBS) is that the stopping powers of channeled and non-channeled particles differ substantially. Consequently, it brings errors not only in the energy-depth conversion of RBS spectra, but also in the quantitative analysis of the disorder profile. In this study, we present measurements of the stopping powers of 4He+ ions channeled along crystallographic axes of Si〈1 0 0〉, 〈1 1 0〉, 〈1 1 1〉, and also along crystallographic planes of (1 0 0) and (1 1 0) in the energy region of 0.6-2 MeV. The aim of this study is to provide an accurate energy-depth conversion for channeling RBS data.

UR - https://www.scopus.com/pages/publications/33745962474

U2 - 10.1016/j.nimb.2006.03.021

DO - 10.1016/j.nimb.2006.03.021

M3 - Article

SN - 0168-583X

VL - 249

SP - 51

EP - 54

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 1-2 SPEC. ISS.

ER -

Measurements of the stopping powers of He ions incident along the different channel axes and channel planes of Si

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