Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer with Fiber Optical Interconnects

Daniel Dominguez; Lisa Hackett; Micheal Miller; Jennifer Restrepo; Katya Casper; Matt Eichenfield

doi:10.1109/INERTIAL51137.2021.9430488

Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer with Fiber Optical Interconnects

Daniel Dominguez
, Lisa Hackett
, Micheal Miller
, Jennifer Restrepo
, Katya Casper
, Matt Eichenfield

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Scopus citations

Abstract

We present the design, fabrication, and initial characterization of a CMOS compatible, ultra-high bandwidth, bulk-micro machined, optomechanical accelerometer. Displacement detection is achieved via a SiN integrated photonics Mach-Zehnder interferometer (MZI) fabricated on the surface of the device that is optomechanically coupled to acceleration-induced deformation of the accelerometer's proof mass tethers. The device is designed to measure vibrations at microsecond timescales with high dynamic range for the characterization of shock dynamics.

Original language	English
Title of host publication	INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
DOIs	https://doi.org/10.1109/INERTIAL51137.2021.9430488
State	Published - Mar 22 2021
Externally published	Yes

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10.1109/INERTIAL51137.2021.9430488

Cite this

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title = "Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer with Fiber Optical Interconnects",

abstract = "We present the design, fabrication, and initial characterization of a CMOS compatible, ultra-high bandwidth, bulk-micro machined, optomechanical accelerometer. Displacement detection is achieved via a SiN integrated photonics Mach-Zehnder interferometer (MZI) fabricated on the surface of the device that is optomechanically coupled to acceleration-induced deformation of the accelerometer's proof mass tethers. The device is designed to measure vibrations at microsecond timescales with high dynamic range for the characterization of shock dynamics.",

author = "Daniel Dominguez and Lisa Hackett and Micheal Miller and Jennifer Restrepo and Katya Casper and Matt Eichenfield",

year = "2021",

month = mar,

day = "22",

doi = "10.1109/INERTIAL51137.2021.9430488",

language = "English",

isbn = "9781728150994",

booktitle = "INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",

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T1 - Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer with Fiber Optical Interconnects

AU - Dominguez, Daniel

AU - Hackett, Lisa

AU - Miller, Micheal

AU - Restrepo, Jennifer

AU - Casper, Katya

AU - Eichenfield, Matt

PY - 2021/3/22

Y1 - 2021/3/22

N2 - We present the design, fabrication, and initial characterization of a CMOS compatible, ultra-high bandwidth, bulk-micro machined, optomechanical accelerometer. Displacement detection is achieved via a SiN integrated photonics Mach-Zehnder interferometer (MZI) fabricated on the surface of the device that is optomechanically coupled to acceleration-induced deformation of the accelerometer's proof mass tethers. The device is designed to measure vibrations at microsecond timescales with high dynamic range for the characterization of shock dynamics.

AB - We present the design, fabrication, and initial characterization of a CMOS compatible, ultra-high bandwidth, bulk-micro machined, optomechanical accelerometer. Displacement detection is achieved via a SiN integrated photonics Mach-Zehnder interferometer (MZI) fabricated on the surface of the device that is optomechanically coupled to acceleration-induced deformation of the accelerometer's proof mass tethers. The device is designed to measure vibrations at microsecond timescales with high dynamic range for the characterization of shock dynamics.

UR - https://www.scopus.com/pages/publications/85107526636

U2 - 10.1109/INERTIAL51137.2021.9430488

DO - 10.1109/INERTIAL51137.2021.9430488

M3 - Conference contribution

SN - 9781728150994

BT - INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

ER -

Megahertz Bandwidth Bulk Micromachined Optomechanical Accelerometer with Fiber Optical Interconnects

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