Microstructure and phase development of buried resistors in low temperature co-fired ceramic

Mark A. Rodriguez; Pin Yang; Paul Kotula; Duane Dimos

doi:10.1023/A:1026575428178

Microstructure and phase development of buried resistors in low temperature co-fired ceramic

Mark A. Rodriguez
, Pin Yang
, Paul Kotula
, Duane Dimos

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

Embedded resistor circuits have been generated with the use of a Micropen system, Ag conductor paste (DuPont 6142D), a new experimental resistor ink from DuPont (E84005-140), and Low Temperature Co-fired Ceramic (LTCC) green tape (DuPont A951). Sample circuits were processed under varying peak temperature ranges (835°C-875°C) and peak soak times (10 min-720 min). Resistors were characterized by SEM, TEM, EDS, and high-temperature XRD. Results indicate that devitrification of resistor glass phase to Celcian, Hexacelcian, and a Zinc-silicate phase occurred in the firing ranges used (835-875°C) but kinetics of divitrification vary substantially over this temperature range. The resistor material appears structurally and chemically compatible with the LTCC. RuO2 grains do not significantly react with the devitrifying matrix material during processing. RuO2 grains coarsen significantly with extended time and temperature and the electrical properties appear to be strongly affected by the change in RuO2 grain size.

Original language	English
Pages (from-to)	217-223
Number of pages	7
Journal	Journal of Electroceramics
Volume	5
Issue number	3
DOIs	https://doi.org/10.1023/A:1026575428178
State	Published - Nov 1 2000
Externally published	Yes

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title = "Microstructure and phase development of buried resistors in low temperature co-fired ceramic",

abstract = "Embedded resistor circuits have been generated with the use of a Micropen system, Ag conductor paste (DuPont 6142D), a new experimental resistor ink from DuPont (E84005-140), and Low Temperature Co-fired Ceramic (LTCC) green tape (DuPont A951). Sample circuits were processed under varying peak temperature ranges (835°C-875°C) and peak soak times (10 min-720 min). Resistors were characterized by SEM, TEM, EDS, and high-temperature XRD. Results indicate that devitrification of resistor glass phase to Celcian, Hexacelcian, and a Zinc-silicate phase occurred in the firing ranges used (835-875°C) but kinetics of divitrification vary substantially over this temperature range. The resistor material appears structurally and chemically compatible with the LTCC. RuO2 grains do not significantly react with the devitrifying matrix material during processing. RuO2 grains coarsen significantly with extended time and temperature and the electrical properties appear to be strongly affected by the change in RuO2 grain size.",

author = "Rodriguez, \{Mark A.\} and Pin Yang and Paul Kotula and Duane Dimos",

year = "2000",

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doi = "10.1023/A:1026575428178",

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journal = "Journal of Electroceramics",

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TY - JOUR

T1 - Microstructure and phase development of buried resistors in low temperature co-fired ceramic

AU - Rodriguez, Mark A.

AU - Yang, Pin

AU - Kotula, Paul

AU - Dimos, Duane

PY - 2000/11/1

Y1 - 2000/11/1

N2 - Embedded resistor circuits have been generated with the use of a Micropen system, Ag conductor paste (DuPont 6142D), a new experimental resistor ink from DuPont (E84005-140), and Low Temperature Co-fired Ceramic (LTCC) green tape (DuPont A951). Sample circuits were processed under varying peak temperature ranges (835°C-875°C) and peak soak times (10 min-720 min). Resistors were characterized by SEM, TEM, EDS, and high-temperature XRD. Results indicate that devitrification of resistor glass phase to Celcian, Hexacelcian, and a Zinc-silicate phase occurred in the firing ranges used (835-875°C) but kinetics of divitrification vary substantially over this temperature range. The resistor material appears structurally and chemically compatible with the LTCC. RuO2 grains do not significantly react with the devitrifying matrix material during processing. RuO2 grains coarsen significantly with extended time and temperature and the electrical properties appear to be strongly affected by the change in RuO2 grain size.

AB - Embedded resistor circuits have been generated with the use of a Micropen system, Ag conductor paste (DuPont 6142D), a new experimental resistor ink from DuPont (E84005-140), and Low Temperature Co-fired Ceramic (LTCC) green tape (DuPont A951). Sample circuits were processed under varying peak temperature ranges (835°C-875°C) and peak soak times (10 min-720 min). Resistors were characterized by SEM, TEM, EDS, and high-temperature XRD. Results indicate that devitrification of resistor glass phase to Celcian, Hexacelcian, and a Zinc-silicate phase occurred in the firing ranges used (835-875°C) but kinetics of divitrification vary substantially over this temperature range. The resistor material appears structurally and chemically compatible with the LTCC. RuO2 grains do not significantly react with the devitrifying matrix material during processing. RuO2 grains coarsen significantly with extended time and temperature and the electrical properties appear to be strongly affected by the change in RuO2 grain size.

UR - https://www.scopus.com/pages/publications/0034316512

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DO - 10.1023/A:1026575428178

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SN - 1385-3449

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EP - 223

JO - Journal of Electroceramics

JF - Journal of Electroceramics

IS - 3

ER -

Microstructure and phase development of buried resistors in low temperature co-fired ceramic

Abstract

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