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Microstructure-mechanical properties correlation in irradiated amorphous SiOC

  • Qing Su
  • , Sean King
  • , Liyi Li
  • , Tianyao Wang
  • , Jonathan Gigax
  • , Lin Shao
  • , William A. Lanford
  • , Michael Nastasi

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

Abstract

The microstructure and mechanical properties of amorphous silicon oxycarbide (SiOC) before and after irradiation were investigated using Fourier-transform infrared spectroscopy (FTIR), transmission electron microscopy (TEM), Rutherford backscattering spectrometry (RBS), nuclear reaction analysis and nano-indentation. SiOC films of different compositions were subjected 1 displacement per atom (dpa) He+ irradiation. The irradiation results in a decrease of Si–O–Si bond angle and an increase of average coordination number. These microstructure variations are associated with increases of hardness and Young's modulus. Our findings reveal that mechanical properties correlate with the Si–O–Si bond angle and average coordination number in irradiated amorphous SiOC alloys.

Original languageEnglish
Pages (from-to)316-320
Number of pages5
JournalScripta Materialia
Volume146
DOIs
StatePublished - Mar 15 2018
Externally publishedYes

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