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Model diffraction profiles parallel to rough step edges

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Modeling of rough step edges has been made and compared with scanning tunneling microscopy (STM) micrographs. In this paper, we use a phenomenological Hamiltonian to calculate diffraction profiles which can be used to determine the extent of step-edge meandering. Comparison with experiment is made based on a parametrization of the step statistics obtained from STM data of silicon (001) step edges.
Original languageEnglish
Pages (from-to)2848-2852
Number of pages5
JournalJournal of Applied Physics
Volume67
Issue number6
DOIs
StatePublished - Dec 1 1990
Externally publishedYes

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