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Molecular beam epitaxy and characterization of Al<inf> x</inf> Ga<inf>1-x</inf> As<inf> y</inf> Sb<inf>1-y</inf> (0.0 ≤x ≤ 1.0) lattice matched to InAs substrates

  • J. A. Lott
  • , L. R. Dawson
  • , E. D. Jones
  • , I. J. Fritz
  • , J. S. Nelson
  • , S. R. Kurtz

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

We report the molecular beam epitaxial growth of Al x Ga1-x As y Sb1-y (0.0 ≤ x ≤ 1.0) on undoped, liquid-encapsulated Czochralski, (100) oriented InAs substrates. The degree of lattice mismatch was determined by x-ray diffraction. The lattice matched materials (y ≈ 0.08 + 0.08 x) were characterized by low temperature photoluminescence, electro-reflectance, and capacitance-voltage measurements. The experimental bandgap energies agree with earlier experimental results for Al x Ga1-x Sb, and also with a self-consistent first principles pseudopotential model. The capacitance-voltage measurements indicate background acceptor concentrations for the unintentionally-doped epitaxial layers of about 2 × 1015 cm-3 at x = 1.0 to 5 × 1016 cm-3 at x ≈ 0.0. © 1990 AIME.
Original languageEnglish
Pages (from-to)989-993
Number of pages5
JournalJournal of Electronic Materials
Volume19
Issue number9
DOIs
StatePublished - Sep 1 1990
Externally publishedYes

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