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Multimillion-atom simulations of atomic-level surface stresses and pressure distribution on InAs/GaAs mesas

  • Xiaotao Su
  • , Rajiv K. Kalia
  • , Anupam Madhukar
  • , Aiichiro Nakano
  • , Priya Vashishta

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Large-scale molecular dynamics simulations are performed to investigate the atomic-level stresses on InAs/GaAs mesas. The simulations are based on an interatomic-potential scheme for InAs/GaAs systems which depends on the local chemical composition. Multiresolution techniques are used to speed up the simulations. InAs/GaAs square mesas with {101}-type sidewalls are studied. The atomic-level pressure distribution and surface atomic stresses on the sidewalls with 12, 10, 8 and 6 monolayers of InAs overlayers have been calculated.
Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
Pages269-274
Number of pages6
Volume584
StatePublished - Jan 1 2000
Externally publishedYes

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