Abstract
Large-scale molecular dynamics simulations are performed to investigate the atomic-level stresses on InAs/GaAs mesas. The simulations are based on an interatomic-potential scheme for InAs/GaAs systems which depends on the local chemical composition. Multiresolution techniques are used to speed up the simulations. InAs/GaAs square mesas with {101}-type sidewalls are studied. The atomic-level pressure distribution and surface atomic stresses on the sidewalls with 12, 10, 8 and 6 monolayers of InAs overlayers have been calculated.
| Original language | English |
|---|---|
| Title of host publication | Materials Research Society Symposium - Proceedings |
| Pages | 269-274 |
| Number of pages | 6 |
| Volume | 584 |
| State | Published - Jan 1 2000 |
| Externally published | Yes |
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