Multivariate statistical analysis for x-ray photoelectron spectroscopy spectral imaging: Effect of image acquisition time

D. E. Peebles; J. A. Ohlhausen; P. G. Kotula; S. Hutton; C. Blomfield

doi:10.1116/1.1765134

Multivariate statistical analysis for x-ray photoelectron spectroscopy spectral imaging: Effect of image acquisition time

D. E. Peebles
, J. A. Ohlhausen
, P. G. Kotula
, S. Hutton
, C. Blomfield

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

23 Scopus citations

Abstract

The time of acquisition of spectral images for x-ray photoelectron spectroscopy (XPS) was analyzed. The spectral image data was analyzed using multivariate statistical analysis techniques to determine the chemical component species and their distribution and concentrations. The multivariate analysis was observed to be efficient as they provided improved signal to noise ratio, image contrast and intensity uniformity. The statistical aggregation of the large number of noisy data which points in the image helped to enhance the image quality.

Original language	English
Title of host publication	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Pages	1579-1586
Number of pages	8
Volume	22
Edition	4
DOIs	https://doi.org/10.1116/1.1765134
State	Published - Jul 1 2004
Externally published	Yes

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10.1116/1.1765134

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title = "Multivariate statistical analysis for x-ray photoelectron spectroscopy spectral imaging: Effect of image acquisition time",

abstract = "The time of acquisition of spectral images for x-ray photoelectron spectroscopy (XPS) was analyzed. The spectral image data was analyzed using multivariate statistical analysis techniques to determine the chemical component species and their distribution and concentrations. The multivariate analysis was observed to be efficient as they provided improved signal to noise ratio, image contrast and intensity uniformity. The statistical aggregation of the large number of noisy data which points in the image helped to enhance the image quality.",

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Multivariate statistical analysis for x-ray photoelectron spectroscopy spectral imaging: Effect of image acquisition time. / Peebles, D. E.; Ohlhausen, J. A.; Kotula, P. G. et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. Vol. 22 4. ed. 2004. p. 1579-1586.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Multivariate statistical analysis for x-ray photoelectron spectroscopy spectral imaging: Effect of image acquisition time

AU - Peebles, D. E.

AU - Ohlhausen, J. A.

AU - Kotula, P. G.

AU - Hutton, S.

AU - Blomfield, C.

PY - 2004/7/1

Y1 - 2004/7/1

N2 - The time of acquisition of spectral images for x-ray photoelectron spectroscopy (XPS) was analyzed. The spectral image data was analyzed using multivariate statistical analysis techniques to determine the chemical component species and their distribution and concentrations. The multivariate analysis was observed to be efficient as they provided improved signal to noise ratio, image contrast and intensity uniformity. The statistical aggregation of the large number of noisy data which points in the image helped to enhance the image quality.

AB - The time of acquisition of spectral images for x-ray photoelectron spectroscopy (XPS) was analyzed. The spectral image data was analyzed using multivariate statistical analysis techniques to determine the chemical component species and their distribution and concentrations. The multivariate analysis was observed to be efficient as they provided improved signal to noise ratio, image contrast and intensity uniformity. The statistical aggregation of the large number of noisy data which points in the image helped to enhance the image quality.

UR - https://www.scopus.com/pages/publications/4444247559

U2 - 10.1116/1.1765134

DO - 10.1116/1.1765134

M3 - Conference contribution

VL - 22

SP - 1579

EP - 1586

BT - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ER -

Multivariate statistical analysis for x-ray photoelectron spectroscopy spectral imaging: Effect of image acquisition time

Abstract

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