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Nanoindentation of silicon nitride: A multimillion-atom molecular dynamics study

  • Phillip Walsh
  • , Andrey Omeltchenko
  • , Rajiv K. Kalia
  • , Aiichiro Nakano
  • , Priya Vashishta
  • , Subhash Saini

Research output: Contribution to journalArticlepeer-review

76 Scopus citations

Abstract

Ten-million-atom molecular dynamics (MD) simulations of nanoindentation of crystalline and amorphous Si3N4 was presented. The indentor was a square-based pyramid with a height of 90 Å and an apex corner angle of 90°. Results demonstrated the feasibility of using MD simulations to rank material properties, like hardness, and to improve on the quality of interatomic potentials for various materials.
Original languageEnglish
Pages (from-to)118-120
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number1
DOIs
StatePublished - Jan 6 2003
Externally publishedYes

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