@inproceedings{db3fc612c0274476a66d77397d954f8f,
title = "Native Oxide Formation in NbTiN Thin Films for Traveling-Wave Superconducting Nanostripe Single-Photon Detectors",
abstract = "We report on a systematic study of native oxide formation in films of NbTiN deposited using a physical vapor deposition process on silicon nitride/silicon dioxide dielectrics, intended for fabrication of silicon quantum photonic integrated circuits.",
author = "Nazib, \{Sami A.\} and Hutchins-Delgado, \{Troy A.\} and Reymatias, \{Mark V.\} and Hosuk Lee and Erum Jamil and Smolyakov, \{Gennady A.\} and Lu, \{Tzu Ming\} and Ivanov, \{Sergei A.\} and John Nogan and Ivan Komissarov and Roman Sobolewski and Marek Osinski",
year = "2023",
doi = "10.1364/QUANTUM.2023.QW2A.34",
language = "English",
series = "Quantum 2.0: Proceedings Optica Quantum 2.0 Conference and Exhibition",
publisher = "Unknown Publisher",
booktitle = "Quantum 2.0",
note = "Optica Quantum 2.0 Conference and Exhibition, Quantum 2.0 ; Conference date: 01-01-2023",
}