Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

I. Brener; P. Chu; M. Tsai; C. Pu; M. Chou; J. Dadap; D. Lee; B. Tang; D. Peale; N. Bonadeo; R. Harel; C. Wu; J. Johnson; S. Park; S. Lee; D. Tong; R. Doran; K. Bergman; T. Chau; E. Goldstein; L. Lin; J. Walker; W. Zhong; R. Gibson

Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

I. Brener
, P. Chu
, M. Tsai
, C. Pu
, M. Chou
, J. Dadap
, D. Lee
, B. Tang
, D. Peale
, N. Bonadeo
, R. Harel
, C. Wu
, J. Johnson
, S. Park
, S. Lee
, D. Tong
, R. Doran
, K. Bergman
, T. Chau
, E. Goldstein

L. Lin, J. Walker, W. Zhong, R. Gibson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Scopus citations

Abstract

Full closed-loop control of electrostatically actuated MEMS mirrors was investigated. Performance of MEMS mirrors was also analyzed in a large port-count optical switch. It was found that MEMS mirrors could be driven well beyond their snapdown angle with long term angular noise. It was also observed that fluctuations in the optical power were of the order of 0.1-0.2 dB when the mirrors were under closed loop control.

Original language	English
Title of host publication	Conference on Optical Fiber Communication, Technical Digest Series
Pages	385-386
Number of pages	2
Volume	86
State	Published - Dec 1 2003
Externally published	Yes

Cite this

Brener, I., Chu, P., Tsai, M., Pu, C., Chou, M., Dadap, J., Lee, D., Tang, B., Peale, D., Bonadeo, N., Harel, R., Wu, C., Johnson, J., Park, S., Lee, S., Tong, D., Doran, R., Bergman, K., Chau, T., ... Gibson, R. (2003). Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch. In Conference on Optical Fiber Communication, Technical Digest Series (Vol. 86, pp. 385-386)

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title = "Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch",

abstract = "Full closed-loop control of electrostatically actuated MEMS mirrors was investigated. Performance of MEMS mirrors was also analyzed in a large port-count optical switch. It was found that MEMS mirrors could be driven well beyond their snapdown angle with long term angular noise. It was also observed that fluctuations in the optical power were of the order of 0.1-0.2 dB when the mirrors were under closed loop control.",

author = "I. Brener and P. Chu and M. Tsai and C. Pu and M. Chou and J. Dadap and D. Lee and B. Tang and D. Peale and N. Bonadeo and R. Harel and C. Wu and J. Johnson and S. Park and S. Lee and D. Tong and R. Doran and K. Bergman and T. Chau and E. Goldstein and L. Lin and J. Walker and W. Zhong and R. Gibson",

year = "2003",

month = dec,

day = "1",

language = "English",

volume = "86",

pages = "385--386",

booktitle = "Conference on Optical Fiber Communication, Technical Digest Series",

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Brener, I, Chu, P, Tsai, M, Pu, C, Chou, M, Dadap, J, Lee, D, Tang, B, Peale, D, Bonadeo, N, Harel, R, Wu, C, Johnson, J, Park, S, Lee, S, Tong, D, Doran, R, Bergman, K, Chau, T, Goldstein, E, Lin, L, Walker, J, Zhong, W & Gibson, R 2003, Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch. in Conference on Optical Fiber Communication, Technical Digest Series. vol. 86, pp. 385-386.

TY - GEN

T1 - Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

AU - Brener, I.

AU - Chu, P.

AU - Tsai, M.

AU - Pu, C.

AU - Chou, M.

AU - Dadap, J.

AU - Lee, D.

AU - Tang, B.

AU - Peale, D.

AU - Bonadeo, N.

AU - Harel, R.

AU - Wu, C.

AU - Johnson, J.

AU - Park, S.

AU - Lee, S.

AU - Tong, D.

AU - Doran, R.

AU - Bergman, K.

AU - Chau, T.

AU - Goldstein, E.

AU - Lin, L.

AU - Walker, J.

AU - Zhong, W.

AU - Gibson, R.

PY - 2003/12/1

Y1 - 2003/12/1

N2 - Full closed-loop control of electrostatically actuated MEMS mirrors was investigated. Performance of MEMS mirrors was also analyzed in a large port-count optical switch. It was found that MEMS mirrors could be driven well beyond their snapdown angle with long term angular noise. It was also observed that fluctuations in the optical power were of the order of 0.1-0.2 dB when the mirrors were under closed loop control.

AB - Full closed-loop control of electrostatically actuated MEMS mirrors was investigated. Performance of MEMS mirrors was also analyzed in a large port-count optical switch. It was found that MEMS mirrors could be driven well beyond their snapdown angle with long term angular noise. It was also observed that fluctuations in the optical power were of the order of 0.1-0.2 dB when the mirrors were under closed loop control.

UR - https://www.scopus.com/pages/publications/12144290909

M3 - Conference contribution

VL - 86

SP - 385

EP - 386

BT - Conference on Optical Fiber Communication, Technical Digest Series

ER -

Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical Switch

Abstract

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